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Lens fixing device and mounting method

A lens fixing and installation method technology, applied in the optical field, can solve the problems of low assembly accuracy and unreliable fixation, and achieve the effects of eliminating thermal stress and mechanical installation stress, simple structure and reliable fixation.

Active Publication Date: 2009-07-15
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
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  • Claims
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Problems solved by technology

[0005] The object of the present invention is to provide a lens fixing device and an installation method, which are used to solve the problems of unreliable fixing and low assembly accuracy of the existing lens fixing device, and can realize flexible assembly of the lens

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  • Lens fixing device and mounting method
  • Lens fixing device and mounting method

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Embodiment Construction

[0039] The lens fixing device and installation method proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0040] For details, please refer to Figure 4 to Figure 7 , the lens fixing device is used to fix the lens 10, which specifically includes: a mirror base 20 and a plurality of flexible balls 30, wherein the mirror base 20 matches the lens 10, in detail, the mirror base 20 includes a cylindrical body 21 and The positioning protrusion 22 connected with the cylindrical body 21, the cylindrical body 21 has an inner diameter, the lens 10 has an outer diameter, the inner diameter of the cylindrical body 21 is greater than the outer diameter of the lens 10, the lens 10 and the mirror holder 20 is clearance fit. The positioning protrusion 22 is tangent to the curved surface of the lens 10 to ensure that the lens 10 is installed in contact and is not damaged during the installation pr...

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Abstract

The invention provides lens fixing device and mounting method, the lens fixing device is used for fixing the lens and comprises a lens base and a plurality of flexible balls, wherein, the lens base is matched with the lens, a plurality of stepped holes are provided on the lens base, the flexible balls are mounted in the stepped holes. The invention can effectively eliminate the thermal stress and the mechanical mounting stress generated during working, can implement the flexible assembly of the lens, and the lens fixing device has simple structure, convenient and fast mounting, firm fixing and high assembling accuracy.

Description

technical field [0001] The invention relates to the field of optics, in particular to a lens fixing device and an installation method. Background technique [0002] At present, the lens flexible fixing devices used in optical equipment such as lithography machines in the industry mainly adopt glue bonding or use flexible components. For example, a lens flexible mounting technology is disclosed in U.S. Patent 4,929,054, such as Figure 1 to Figure 3 As shown, the lens flexible fixing device includes: a lens barrel 1, a flexible element 2, a lens 3 and an adhesive 4, wherein three evenly distributed grooves are opened on the step of the stepped hole of the lens barrel 1, and the A screw hole 5 is provided in the groove, which is used to fix the flexible element 2. One end of the flexible element 2 hangs out a sheet as a flexible body 6, and an adhesive groove 7 is opened on it, and the adhesive groove 7 is used for To fill with adhesive 4. The installation process of this len...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/02G03F7/20
Inventor 崔建波王洪尊
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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