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Idle running error automatic compensation apparatus for laser heterodyne interferometer

A laser heterodyne interference and automatic compensation technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of cumbersome work, compensation, and inability to perform air travel errors, so as to reduce the influence of the measured light phase, eliminate the Inconsistent refractive index, the effect of improving measurement accuracy

Inactive Publication Date: 2009-07-29
HARBIN INST OF TECH
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Problems solved by technology

[0017] The compensation process of the above method needs to manually measure the length difference between the reference arm and the measuring arm every time it is cleared, that is, the empty distance value L D , and input into the computer for error compensation, the work is cumbersome, and the measurement accuracy of the empty path length is low
Even because of the inability to measure the value of the air travel length in the field measurement occasions, the air travel error compensation cannot be performed
[0018] Based on the above, the compensation method and compensation device for the space error have not yet realized the real-time automatic high-precision compensation for the space error

Method used

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  • Idle running error automatic compensation apparatus for laser heterodyne interferometer
  • Idle running error automatic compensation apparatus for laser heterodyne interferometer
  • Idle running error automatic compensation apparatus for laser heterodyne interferometer

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Embodiment Construction

[0038] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0039] Measuring principle such as figure 1 As shown, according to the compensation formula of the space error, it can be known that to compensate the space error, it is necessary to obtain the air refractive index and the space length value. In the present invention, the air refractive index value is obtained by the air refractive index measuring instrument 1, and the measurement result is input to the control unit 2 of the laser heterodyne interferometer; the empty path length value is obtained by the laser length measuring instrument 3, combined with the electric rotating platform 4, The polarizing plate 5 and the polarizing beam splitter 6 are obtained by measuring the difference in length between the reference prism 7 and the measuring prism 8 and the laser length measuring instrument 3 respectively. Therefore, the necessary conditions for the co...

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Abstract

A laser heterodyne interferometer idle stroke error automatic compensator belongs to the technical field of laser measurement. A polaroid sheet and a laser length measuring instrument are arranged in sequence at a co-optical axis at one side of a polarization splitting prism opposite to a reference prism; the polaroid sheet is fixed at an electric rotary platform; the electric rotary platform, the laser length measuring instrument and an air refracting index measuring instrument are respectively connected with a control unit of the laser heterodyne interferometer by a control bus; a probe sensor of the air refracting index measuring instrument is arranged between the polarization splitting prism and a measurement prism. The compensator can effectively reduce effects by the idle stroke error on measurement results during real-time measurement.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to an automatic compensation device for space error in a laser heterodyne interference system. Background technique [0002] With the rapid development of semiconductor technology and microelectronics technology, the requirements for precision processing technology and parts processing accuracy are getting higher and higher. Although traditional non-optical measurement methods can achieve nanometer or even sub-nanometer measurement resolution, they still need to use optical methods such as laser interferometers for calibration and correction when tracing to the definition of nanometers. The dual-frequency laser interferometer has many advantages such as low signal noise, strong anti-interference ability, easy signal processing and subdivision, and allows multi-channel multiplexing of light sources. Due to its excellent performance, it has been widely used in many pre...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
Inventor 谭久彬胡鹏程杨宏兴刁晓飞
Owner HARBIN INST OF TECH
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