Shear mode-type piezoelectric actuator and liquid droplet delivery head
A transmission device, piezoelectric technology, applied in the direction of inking device, piezoelectric effect/electrostrictive or magnetostrictive motor, generator/motor, etc., can solve the problems of manufacturing difficulties, environmental pollution, etc. , to achieve high frequency drive, improve the effect of displacement efficiency
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[0117] A piezoelectric ceramic composition according to an example of the present invention was manufactured and its characteristics were evaluated.
[0118] The manufacturing method will be described in detail below.
[0119] First, high-purity Li with a purity of 99% or more is prepared as a raw material for the main component of the piezoelectric ceramic composition. 2 CO 3 、Na 2 CO 3 、K 2 CO 3 , Nb 2 o 5 、 Ta 2 o 5 , Sb 2 o 5 . After fully drying, using the above general formula {Li X (K 1-Y Na Y ) 1-X}(Nb 1-Z-W Ta Z Sb W )O 3 The stoichiometric ratio of x=0.04, y=0.52, z=0.1, w=0.06, that is, the above general formula is {Li 0.04 (K 0.48 Na 0.52 ) 0.96}(Nb 0.84 Ta 0.1 Sb 0.06 )O 3 The stoichiometric ratio was prepared.
[0120] Then mix the prepared raw materials in anhydrous acetone by ball milling for 24 hours, dry and prepare the mixture.
[0121] Next, the mixture was preliminarily calcined at 750° C. for 5 hours, and the preliminarily cal...
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