Imaging detector

Abstract

The unvention discloses an imaging detector. A hybrid imaging detector is for detecting ionizing radiation such as X-rays or electron radiation. The detector has a sensor (10) on a read-out chip (20).The sensor (10) includes a plurality of sensor material layers (12, 14) of different materials stacked on top of one another, having differing radiation absorbing properties. The materials may be Siand SiGe, Si and Ge, or Si and amorphous Se, for example. The read-out chip is a photon-counting read-out chip that records a single count when a pulse above a threshold is detected.

Description

technical field [0001] The present invention relates to an imaging radiation detector and in a particular embodiment to a hybrid radiation detector comprising an integrated circuit for performing counting of X-rays, electrons or generally ionizing radiation. Background technique [0002] Imaging radiation detectors such as those used in x-rays or electrons can be of the hybrid type, where the readout chip includes electronics for reading out and processing the data, and the sensor is mounted directly on the readout chip, the device has many A regular grid of pixels (planar geometry) of interconnection bonds (bonds) between the sensor and the readout chip. In an alternative arrangement, the sensor itself has pixels (three-dimensional geometry) resulting from a regular arrangement of electrodes machined into the sensor. The pixels are used for spatially resolved detection of X-rays, electrons or generally ionizing radiation reaching the corresponding pixel. When X-rays, elec...

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Problems solved by technology

[0010] However, this configuration has proven difficult to manufacture in practice to obtain commercial devices

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