High-frequency ultrasonic transducer made of piezoelectric monocrystalline composite material as well as manufacturing method and application thereof

Abstract

The invention discloses a high-frequency ultrasonic transducer made of a piezoelectric monocrystalline composite material as well as a manufacturing method and an application thereof. The high-frequency ultrasonic transducer consists of a piezoelectric monocrystalline composite material wafer, a damping backing material, a first matching layer, a second matching layer, a coaxial electrode lead, a coaxial connector and a metal shell, wherein the second matching layer, the first matching layer, the piezoelectric monocrystalline composite material wafer and the damping backing material are bonded together in sequence; and the coaxial electrode lead is introduced from the positive electrode and the negative electrode of the piezoelectric monocrystalline composite material wafer to the coaxial connector which is fixed on the metal shell. The invention provides a method for manufacturing the transducer by matching acoustic characteristic based on a KLM model. The center frequency Fc of the obtained ultrasonic transducer is equal to 14.67MH, the bandwidth Bw can be up to 107 percent and the pulse echo sensitivity Sr can reach -30dB; and the ultrasonic transducer also has very high sensitivity on the premises of high frequency and large bandwidth. The ultrasonic transducer can be used for medical diagnosis, ultrasonic nondestructive detection and precise thickness measurement.

Description

Technical field [0001] The invention belongs to the field of piezoelectric ultrasonic transducers, and specifically relates to a piezoelectric single crystal composite material high-frequency ultrasonic transducer, and a manufacturing method and application thereof. Background technique [0002] In recent years, with the development of science and technology, there has been a demand for high-frequency, high-sensitivity, and large-bandwidth ultrasonic transducers in many occasions. In the field of medical diagnosis, such as ophthalmology, oral cavity, intravascular, skin, etc., high-frequency ultrasound transducers used for imaging and measurement have put forward high sensitivity and high bandwidth requirements. In the field of ultrasonic inspection, the rapid development of industry, military, etc. also hopes that high-frequency transducers can achieve higher sensitivity and greater bandwidth for spot welding inspection, composite material thin plate, composite material coating ...

AI Technical Summary

Problems solved by technology

[0005] The two materials announced by Chinese patent CN2841166Y and Chinese patent CN2097407U are Kt electromechanical conversion efficiency less than 50%, far less than 68% of piezoelectric single crystal, and the dielectric constant of PMNT piezoelectric single crystal announced by Chinese patent CN1920122A It reaches 4000, which is very unfavorable in high frequency applications

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