System and method for controlling multi-route temperature control channel

Abstract

The invention discloses a system for controlling a multi-route temperature control channel, which comprises a loop for controlling an n-route temperature control channel and a synergistic temperature control module, wherein the synergistic temperature control module compares the first difference value of a target temperature control channel with the first different value of a neighboring temperature control channel and then determines whether the synergistic control of the neighboring channel needs to be started according to the comparison result; if so, a control signal is sent to a switch module of the neighboring temperature control channel so that the power supply of a heating module is connected or disconnected, and further the synergistic control on the target temperature control channel can be conducted through the heat transfer between the target temperature control channel and the neighboring temperature control channel. In addition, the invention also provides a method for controlling the multi-route temperature control channel. The system and the method can cause the multi-route temperature control channel to synergistically work, improve the temperature homogeneity of the whole system in a faster and better manner and simultaneously shorten the temperature regulation and control time so as to prevent the excessive aging of components including heater and the like in the temperature control channel, thus prolonging the service life of the components.

Description

technical field [0001] The invention relates to the technical field of microelectronics, in particular to a multi-channel temperature control channel control system. In addition, the present invention also relates to a method for controlling multiple temperature control channels. Background technique [0002] With the rapid development of electronic technology, people have higher and higher requirements for the integration of integrated circuits, which requires companies that produce integrated circuits to continuously improve the processing capabilities of semiconductor devices. At present, plasma etching technology is widely used in the processing and manufacturing of semiconductor devices. The so-called plasma etching technology refers to the ionization of the reactive gas under the excitation of radio frequency power to form a plasma containing a large number of active particles such as electrons, ions, excited atoms, molecules and free radicals. Various physical and c...

AI Technical Summary

Problems solved by technology

[0016] First, in the multi-channel temperature control channel control method provided by the prior art, each temperature control channel can only be controlled independently, and cannot be controlled in coordination with each other, that is to say, it cannot be controlled by the control function of other temperature control channels. A certain temperature control channel for auxiliary control

In this way, if the difference between the temperature measurement value of a certain monitoring point in the reaction chamber and its temperature setting value is greater than the allowable range of the system, the heating operation can only be performed by the temperature control channel corresponding to the monitoring point or the heating operation can be stopped. To regulate the temperature of the temperature control channel, instead of auxiliary regulation of the temperature control channel corresponding to the monitoring point by means of the temperature change of the adjacent temperature control channel, so the required control time is usually relatively long

[0017] Second, due to the long control time required by the multi-channel temperature control channel control method provided by the prior art, the temperature at different positions (that is, different temperature control channels) in the reaction chamber is always insufficient during the temperature control period. uniform

Moreover, in order to make the temperatures of the temperature control channels uniform among each other, for example, to make the temperature of the temperature control channel with high heat dissipation efficiency and the temperature control channel with low heat dissipation efficiency uniform, it is necessary to make the temperature control channel with high heat dissipation efficiency Compared with the heaters of other temperature control channels, the heater has higher heating power and takes longer heating time, which will inevitably accelerate the aging of the heater of this temperature control channel and affect its service life

Images