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Micro array type colloid propeller

A technology of micro-array and thruster, which is applied in the direction of thrust reverser, machine/engine, mechanical equipment, etc., can solve the problems such as difficult injection control, and achieve the effect of avoiding influence and interference

Inactive Publication Date: 2009-09-23
ZHONGBEI UNIV
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Problems solved by technology

[0005] In order to realize the miniaturization and micro-thrust of the colloid thruster, and at the same time solve the problems such as liquid supply of the jet nozzle and difficulty in spray control, the present invention provides a micro-array colloid thruster based on MEMS technology

Method used

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  • Micro array type colloid propeller
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Embodiment Construction

[0022] The micro-array colloid thruster includes the ejector 1 and the extractor 2 made by processing the high-resistance single crystal silicon substrate by ICP etching process, and the ejector 1 and the extractor 2 are placed between the ejector 1 and the extractor 2 and bonded to the two poles. The glass support frame 3 (i.e. the intermediate pole), the high-resistance monocrystalline silicon substrate 4 of the jet electrode 1 is etched with several tubular nozzles 5, and the side of the jet pole 1 etched with the tubular nozzles 5 faces the extraction pole 2, and the tubular nozzles The infusion channel 6 of 5 vertically runs through the high-resistance monocrystalline silicon substrate 4, the tubular nozzles 5 on the jet electrode 1 are arranged in columns, and the high-resistance monocrystalline silicon substrate 4 of the jet electrode 1 is etched with a number of strips parallel to each other. groove 7, and only one row of tubular nozzles 5 is arranged in the strip-shape...

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Abstract

The invention relates to a micro colloid propeller, in particular to a micro array type colloid propeller. The micro array type colloid propeller realizes micromation and microthrust, solves the problems of difficult control of liquid supply and jetting of a nozzle of a jetting pole and the like and comprises the jetting pole, a drawing pole and a glass supporting frame body; a base plate of the jetting pole is etched with a plurality of tubular nozzles which are arranged in row, and is also etched with a plurality of strip etching grooves which are parallel; each strip etching groove is internally provided with a row of tubular nozzles; the bottom of each etching groove and the top part of the tubular nozzle are sputtered with an aluminium layer; one end of each etching groove respectively provided with a terminal communicated with the aluminium layer at the bottom of the groove; the inside of a liquid delivery channel of the tubular nozzle is processed into a porous silicon structure by adopting HF etching technique; the drawing pole is paliform, and strip grid seams thereof face the etching grooves of the jetting pole. The micro array type colloid propeller has the advantages of stable performance, high aligning precision, convenient processing and easy control for liquid supply and jetting and the like and can realize the purpose of controlling jetting of the nozzle by batches.

Description

technical field [0001] The invention relates to a microcolloid thruster, in particular to a micro-array colloid thruster based on MEMS technology. Background technique [0002] With the development of aerospace technology, deep space exploration, and lunar soft landing technology, on the one hand, micro-nano satellites are required to be miniaturized, that is, to reduce the volume and weight of propellers that account for a large proportion of micro-nano satellites; on the other hand, it is required that the propellers can Provide micro-N level thrust, so as to achieve precise positioning. [0003] Such as figure 1 As shown, the existing microcolloid propeller uses the principle of electric injection to convert electrical energy into kinetic energy. The propeller includes an ejector electrode and an extraction electrode, and uses a strong polar liquid as a working medium, and a high voltage is added between the ejection electrode and the extraction electrode. The high-volt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F03H99/00
Inventor 熊继军张文栋寇丽丽薛晨阳张国军
Owner ZHONGBEI UNIV
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