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Method for quantitative determination of nickel and/or copper and equipment to be used in the method

A technology for copper complexes and nickel complexes, which is applied in measurement devices, chemical method analysis, and analysis using chemical indicators, etc., can solve problems such as inability to obtain sensitivity and difficulty in determining ppb-level copper concentration.

Inactive Publication Date: 2009-10-14
NOMURA MICRO SCI CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, this method is also difficult to measure the copper concentration at the ppb level, and sufficient sensitivity cannot be obtained.
[0004] Therefore, for example, in the measurement of ppb-level trace ions that need to be detected in semiconductor polishing slurry or semiconductor cleaning chemical reagents used in the manufacturing process of semiconductor devices, there is no suitable method.

Method used

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  • Method for quantitative determination of nickel and/or copper and equipment to be used in the method
  • Method for quantitative determination of nickel and/or copper and equipment to be used in the method
  • Method for quantitative determination of nickel and/or copper and equipment to be used in the method

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Embodiment Construction

[0062] Next, examples of the present invention will be described.

[0063] [Quantification of nickel by visual detection method]

[0064] Pour 20ml of sample solution containing nickel and 6mol / L sodium nitrate as a salting-out agent into a Teflon (registered trademark) beaker, add 2ml of 0.63mol / L sodium thiosulfate solution, 1ml of 4.5 ×10 -3 mol / L of α-furildioxime (Tokyo Chemical Industry Co., Ltd.) / ethanol solution, 1.5ml of pH regulator (0.1mol / L, TAPS-NaOH, pH8.3, Wako Pure Chemical Industries, Ltd.), Make the volume to 25ml with water and shake and mix well. After passing the liquid through a cellulose acetate membrane filter (ADVANTEC, pore size 0.20 μm), take out the filter, dry it at room temperature, and compare the degree of coloring visually. As a result, as figure 1 As shown, the concentration of nickel can be estimated by visually comparing the degree of coloration of the filter membrane. When 4.8 mol / L of sodium nitrate is coexisted, compared with the cas...

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Abstract

A method for quantitative determination of nickel and / or copper, by which a slight amount of nickel and / or copper contained in a liquid sample can be easily and simply determined in situ; and equipment to be used in the method. The method comprises the step of adding a complex forming agent capable of forming a complex with nickel and copper to a liquid sample containing nickel and / or copper in unknown concentrations to form colored fine particles of a nickel complex and / or a copper complex and the step of determining the quantities of nickel and / or copper on the basis of the colored fine particles.

Description

technical field [0001] The present invention relates to a quantitative method capable of easily quantifying nickel and / or copper contained in a sample liquid in an ultra-trace amount, and an apparatus used in the method. Background technique [0002] Conventionally, inductively coupled plasma emission spectrometry, graphite furnace atomic absorption spectrometry, and the like are known as quantification methods for nickel and copper. However, these quantitative methods require large and expensive devices, and are not suitable for on-site sample analysis. [0003] Also, for nickel, there is an absorption photometry method using dimethylglyoxime (for example, refer to JIS G1216). However, since this method uses chloroform as an extraction solvent, there is a problem in waste liquid treatment. Moreover, there is a limit to the detection sensitivity of this method, and it is difficult to measure the nickel concentration at the ppb level. In addition, for copper, there is an a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N31/00G01N21/78G01N31/22
CPCG01N31/22G01N31/00G01N21/78
Inventor 水口仁志志田惇一饭山真充阿部嗣
Owner NOMURA MICRO SCI CO LTD