Process for producing arc quartz crucible by vacuum plus coating, equipment, product thereof

A quartz crucible and coating technology, which is applied in the field of crucible manufacturing, can solve the problems that the quartz crucible cannot be solved, and the uniform high-purity quartz layer cannot be sprayed uniformly, so as to improve the crystallization rate, reduce the consumption of coating, increase the strength and durability The effect of high temperature

Inactive Publication Date: 2009-11-04
余姚市启明石英有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0026] An object of the present invention is to solve the above-mentioned prior art crucible manufacturing process can not solve the quartz crucible for a long time, high temperature, high-purity use requirements, and there is a uniform high-purity quartz layer that cannot be sprayed uniformly in a vacuum state, and For the problem of being unable to carry out layered spraying accurately and timely under high temperature conditions, a process for producing quartz crucibles with high anti-deformation ability, high inner surface purity and long-term use at high temperatures, that is, vacuum coating The process of producing arc quartz crucible by layer

Method used

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  • Process for producing arc quartz crucible by vacuum plus coating, equipment, product thereof
  • Process for producing arc quartz crucible by vacuum plus coating, equipment, product thereof
  • Process for producing arc quartz crucible by vacuum plus coating, equipment, product thereof

Examples

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Effect test

Embodiment 1

[0087] To produce 20-inch quartz crucible, the process of vacuum coating to produce arc quartz crucible is as follows:

[0088] 1) Pour the quartz sand into the vacuum mold and scrape out the prefabricated shape with a forming rod. The mold enters the melting chamber, and the vacuum pump is turned on. The vacuum degree is controlled at 200-500Pa;

[0089] 2) Power on the electrodes, control the temperature at 1700°C to 1750°C and start melting, preheat for 9-12 minutes, when the quartz sand melts to a molten state, start the coating feeder, and control the high Spray the pure quartz sand paint into the melting quartz crucible at 3000℃-3500℃, melt for 5-10 minutes, and close the feeding port;

[0090] 3) Spray the mixed spray paint into the quartz crucible that has been sprayed with silica paint by controlling another hopper of the double-bucket feeder and melt it for 3 to 5 minutes, then close the feed port;

[0091] 4) Turn off the vacuum pump while maintaining the temperature...

Embodiment 2

[0099] To produce 18-inch quartz crucible, the process of vacuum coating to produce arc quartz crucible is as follows:

[0100] 1) Pour the quartz sand into the vacuum mold and scrape out the prefabricated shape with a forming rod. The mold enters the melting chamber, and the vacuum pump is turned on. The vacuum degree is controlled at 200Pa;

[0101] 2) The electrode is energized, and the temperature is controlled to start melting at 1700°C. Preheat for 9 minutes. When the quartz sand melts to a molten state, start the coating feeder, and control a hopper of the double-bucket feeder to paint high-purity quartz sand. Spray into a melting quartz crucible at 3000°C, melt for 5 to 10 minutes, and close the feeding port;

[0102] 3) Spray the mixed spray paint into the quartz crucible that has been sprayed with silica paint by controlling another hopper of the double-bucket feeder and melt it for 3 to 5 minutes, then close the feed port;

[0103] 4) Turn off the vacuum pump while...

Embodiment 3

[0107] To produce 16-inch quartz crucible, the process of vacuum coating to produce arc quartz crucible is as follows:

[0108] 1) Pour the quartz sand into the vacuum mold and scrape out the prefabricated shape with a forming rod. The mold enters the melting chamber, and the vacuum pump is turned on. The vacuum degree is controlled at 500Pa;

[0109] 2) The electrode is energized, and the temperature is controlled to start melting at 1750°C. Preheat for 12 minutes. When the quartz sand melts to a molten state, start the coating feeder, and control a hopper of the double-bucket feeder to paint high-purity quartz sand. Spray into a melting quartz crucible at 3500°C, melt for 5 to 10 minutes, and close the feeding port;

[0110] 3) Spray the mixed spray paint into the quartz crucible that has been sprayed with silica paint by controlling another hopper of the double-bucket feeder and melt it for 3 to 5 minutes, then close the feed port;

[0111] 4) Turn off the vacuum pump whil...

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Abstract

The invention relates to the crucible manufacturing field and is a process for producing an arc quartz crucible by vacuum plus coating, equipment, products thereof. The invention solves the problems that the crucible manufacturing process in the prior art can not solve the operating requirements of long time, high temperature, and high purity of the quartz crucible, a uniform high purity quartz layer can not be formed in the vacuum state by uniform spraying, the layered spraying can not be accurately and timely carried out, and the like; therefore the process and the equipment for producing the arc quartz crucible by vacuum plus coating are provided; the quartz sand is poured into a vacuum mould to shape a prebuilt shape which is put into a founded chamber; a vacuum pump is started and the temperature is controlled, and then the melting and preheating begin; by controlling two hoppers of a double-hopper charging machine, the high-purity quartz sand is sprayed into the quartz crucible in the process of melting, and then mixing spraying coating is sprayed; the vacuum pump is closed during keeping the temperature. The quartz crucible produced by the process and the equipment of the invention has strong non-deformability of long time and exhaustion resistance in high temperature and can be used for long time.

Description

technical field [0001] The invention relates to the field of crucible manufacturing, and relates to a process, equipment and products for producing arc quartz crucibles by vacuum coating. Background technique [0002] Quartz crucibles are essential containers for pulling single crystal silicon by the Czochralski method ("cz") in the solar and semiconductor industries. Quartz crucible belongs to the upstream product in the industrial chain. In the "cz" method of pulling a single crystal, the quartz crucible must withstand tens of hours of vacuum, high pressure, high temperature, and under the influence of various chemical changes without obvious deformation, the inner surface of the crucible The purity can meet the quality required for use. The quality of quartz crucible directly affects the purity and cost of semiconductor materials. [0003] 1. Technical background of arc quartz crucible [0004] With the advancement of technology, the market has increasingly stringent ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03B20/00C30B15/10
CPCC03B19/095
Inventor 黄乃军黄洁
Owner 余姚市启明石英有限公司
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