Dynamic random access memory and memory array

Abstract

The invention discloses a dynamic random access memory comprising a substrate, bit lines, word lines, a concave channel, a conductive plunger and a trench type capacitor, wherein the bit lines are configured on the substrate in a first direction, and the word lines are configured on the bit lines in a second direction. The concave channel is positioned in the substrate between the two bit lines below the word lines, and the conductive plunger is connected with the concave channel and the bit lines. The trench type capacitor is configured in the substrate between the two bit lines outside the concave channel. The word lines can be electrically connected with the concave channel directly in the mode of without increasing a chip area, so the access time of the word lines can be accelerated without increasing the chip size.

Description

technical field [0001] The present invention relates to a memory structure, and in particular to a Dynamic Random Access Memory (DRAM) and a memory array. Background technique [0002] As far as the memory is concerned, in order to turn on the memory cells of the same word line without obvious delay time, the word line structure is often designed as a stitch or a segment structure. Such as the technology of US Patent No. 6,043,562 or 6,057,573. However, since the above-mentioned structures require additional space for setting the stitched word line contact window (WL contact) and the word line branch drive circuit (drive IC), the chip size is increased while reducing the delay time. Therefore, it is impossible to meet the requirements of shortening the access time of the word line and miniaturizing the chip size at the same time. Contents of the invention [0003] The invention provides a dynamic random access memory, which can speed up the access time of the word line w...

AI Technical Summary

Problems solved by technology

Therefore, the requirements of shortening the access time of the word line and miniaturization of the chip size cannot be taken into account at the same time.

Images