Double-longitudinal-mode laser frequency-offset- lock method and device based on cavity length thermal regulation

A laser and dual longitudinal mode technology, applied in the field of laser applications, can solve the problems of poor frequency consistency and low comprehensive measurement accuracy, and achieve the effect of good environmental adaptability and simple structure

Inactive Publication Date: 2009-12-30
HARBIN INST OF TECH
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Problems solved by technology

[0009] Aiming at the deficiencies of the existing laser frequency stabilization technology, the present invention proposes a dual longitudinal mode laser bias frequency locking method based on thermal adjustment of the cavity length. Poor consistency leads to

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  • Double-longitudinal-mode laser frequency-offset- lock method and device based on cavity length thermal regulation
  • Double-longitudinal-mode laser frequency-offset- lock method and device based on cavity length thermal regulation
  • Double-longitudinal-mode laser frequency-offset- lock method and device based on cavity length thermal regulation

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Embodiment Construction

[0032] The implementation examples of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0033] Such as figure 1 and figure 2 In the present invention, the dual longitudinal mode laser bias frequency locking device based on thermal adjustment of the cavity length includes a frequency stabilized laser power supply 1, a dual longitudinal mode frequency stabilized laser A, a frequency stabilization status indicator light 2 and an optical fiber beam splitter 3. The device also includes Including n≥1 dual longitudinal mode lasers B with the same structure and in parallel relationship 1 , B 2 ,...,B n , where each dual longitudinal mode laser B 1 , B 2 ,...,B n The assembly structure is: the laser tube power supply 4 is connected to the laser tube 8, the main polarization beam splitter 12 is placed in front of the main output end of the laser tube 8, and the secondary polarization beam splitter 13 is placed between the sec...

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Abstract

A double-longitudinal-mode laser frequency-offset-lock method and a device based on cavity length thermal regulation belong to the application technical field; the invention takes the frequency of laser output by a power balanced type double-longitudinal-mode frequency stabilization laser A as a reference frequency, and simultaneously leads the frequency of laser output by the double-longitudinal-mode laser A with n being more than or equal to B1, B2,..., Bn to keep one fixed difference with the reference frequency, thus ensuring that the laser output by the double-longitudinal-mode laser B1, B2,..., Bn has uniform frequency value, the frequency stability and frequency consistency of the double-longitudinal-mode laser can reach 10<-8>, thereby overcoming the shortcoming that the frequency consistency between frequency stabilization lasers only reaches 10<-6>-10<-7> in the traditional frequency stabilization lasers.

Description

technical field [0001] The invention belongs to the technical field of laser applications, in particular to a dual longitudinal mode laser bias frequency locking method based on thermal adjustment of cavity length and a device thereof. Background technique [0002] In recent years, ultra-precision measurement and processing technologies represented by lithography machines and CNC machine tools have developed towards the direction of large-scale, high-precision, multi-space degrees of freedom simultaneous measurement, and put forward new requirements for laser interferometry systems, as shown in: On the one hand, the reduction of the processing line width requires the measurement uncertainty of the interferometric system to change from 10 -7 increase to 10 -8 , and then require the relative frequency stability of the laser light source to reach 10 -8 ; On the other hand, the large measurement scale and simultaneous measurement of multiple spatial degrees of freedom lead to ...

Claims

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Application Information

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IPC IPC(8): H01S3/139H01S3/10H03L7/00G05B19/04
Inventor 谭久彬胡鹏程付海金杨睿韬
Owner HARBIN INST OF TECH
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