Double-longitudinal-mode laser frequency-offset- lock method and device based on cavity length thermal regulation

Abstract

A double-longitudinal-mode laser frequency-offset-lock method and a device based on cavity length thermal regulation belong to the application technical field; the invention takes the frequency of laser output by a power balanced type double-longitudinal-mode frequency stabilization laser A as a reference frequency, and simultaneously leads the frequency of laser output by the double-longitudinal-mode laser A with n being more than or equal to B1, B2,..., Bn to keep one fixed difference with the reference frequency, thus ensuring that the laser output by the double-longitudinal-mode laser B1, B2,..., Bn has uniform frequency value, the frequency stability and frequency consistency of the double-longitudinal-mode laser can reach 10<-8>, thereby overcoming the shortcoming that the frequency consistency between frequency stabilization lasers only reaches 10<-6>-10<-7> in the traditional frequency stabilization lasers.

Description

technical field [0001] The invention belongs to the technical field of laser applications, in particular to a dual longitudinal mode laser bias frequency locking method based on thermal adjustment of cavity length and a device thereof. Background technique [0002] In recent years, ultra-precision measurement and processing technologies represented by lithography machines and CNC machine tools have developed towards the direction of large-scale, high-precision, multi-space degrees of freedom simultaneous measurement, and put forward new requirements for laser interferometry systems, as shown in: On the one hand, the reduction of the processing line width requires the measurement uncertainty of the interferometric system to change from 10 -7 increase to 10 -8 , and then require the relative frequency stability of the laser light source to reach 10 -8 ; On the other hand, the large measurement scale and simultaneous measurement of multiple spatial degrees of freedom lead to ...

AI Technical Summary

Problems solved by technology

[0009] Aiming at the deficiencies of the existing laser frequency stabilization technology, the present invention proposes a dual longitudinal mode laser bias frequency locking method based on thermal adjustment of the cavity length. Poor consistency leads to the problem of low comprehensive measurement accuracy, and provides a new type of laser light source with good frequency consistency and can be directly applied to industrial sites for the rapidly developing ultra-precision processing and measurement technology

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