Temperature monitoring method and device of production line device

Abstract

The invention discloses a temperature-rise monitoring method of a production line device, which comprising steps as follow: S11, detecting a first current temperature of a heated object; S12, searching out a matched control point from a preset process temperature curve according to the first current temperature; S13, detecting a second current temperature of the heated object after keeping risingtemperature according to the time increment generated when the temperature rises from the matched monitoring point to the next monitoring point; S14, judging whether the temperature increment generated when temperature rises from the first current temperature to the second current temperature is larger than or equal to the temperature increment generated when the temperature rises from the matched monitoring point to next monitoring point; if so, executing S15; if not, recording the abnormal information of temperature; S15, judging whether the second current temperature is lower than the preset objective temperature-rise temperature or not; if so, taking the second current temperature as the first current temperature and going back to S12; if not, finishing the operation. The invention can monitor temperature in real time during the temperature adjustment of the production line device on the bases of improving product percent of pass and lowing cost.

Description

technical field [0001] The invention relates to the technical field of production line equipment, in particular to a method and device for monitoring temperature rise of production line equipment, and a method and device for monitoring temperature drop of production line equipment. Background technique [0002] Production line equipment is an indispensable hardware equipment for the production, manufacturing or process of various products in modern life. In order to reduce costs and improve efficiency as much as possible, the production line equipment is generally equipped with a corresponding control system to control the operation of the production line equipment. In the process of controlling the production line equipment to complete various product production, manufacturing or processes, it is usually necessary to control the temperature. [0003] Taking the In-line PECVD equipment (on-line coating type plasma-enhanced chemical vapor deposition equipment) commonly used i...

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Problems solved by technology

Obviously, it is only a target temperature control process, but in practice, temperature fluctuations often occur during the heating process, affecting the heating uniformity of the heated body or causing damage to the heated body; moreover, maintaining the target temperature In the process, it is often necessary to adjust the temperature to a suitable range through the feedback temperature of multiple processes for multiple heated bodies. Therefore, the temperature control process of the prior art needs to consume too much production cost, and the production efficiency is relatively low.

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