Device for testing and integrating large-caliber plane mirror by Ritchey-Common test
A technology of an integrated device and a plane mirror, applied in the field of optical measurement, can solve the problems of inconvenient adjustment and low precision, and achieve the effects of simple structure, high precision and simple processing
Active Publication Date: 2011-04-27
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology
When changing the test angle, it must be repositioned. Because the standard spherical mirror and the plane mirror are very large in general applications, the adjustment is very inconvenient and the accuracy is not high.
Method used
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Embodiment
[0034] Put the above drawing structure into use, and apply it to the plane mirror type (greater than 500mm) in the process of dynamic detection and adjustment. The dimensional characteristics of this integrated device are: total height a=1691mm (including casters, adjustable in a small range), horizontal dimension b=1685mm, and the distance c between the tested plane mirror and the standard spherical mirror is obtained through actual measurement. The number of heads Z1=1 of the worm screw 14, the modulus m=2mm intermediate diameter φ1=35.5, the lead angle γ=3°13′28″, the modulus m=2mm of the worm wheel 13, the number of teeth Z=342, the intermediate diameter φ2= 648mm. In practical applications, the rotation range of this turntable is 360°. Compared with the general spherical mirror bracket and the large-scale object turntable that need to be used in conjunction with other devices, this integrated device combines the two, and the detectable plane mirror area is large and the ro...
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The invention discloses a device for testing and integrating a large-caliber plane mirror by the Ritchey-Common test, which comprises a body, an object stage and a high-precision rotating table, wherein the body is fixedly connected with a spherical mirror bracket; a plane mirror supporting rotating table-bracket system is arranged on the object stage; and the high-precision rotating table can freely rotate 360 DEG. The lateral surface of the whole structure is in an L shape; the rotating shaft of the plane mirror supporting rotating table is coaxial with the rotating shaft of the object stage; the object stage and the load thereof are unloaded and placed on a substrate through a spherical guide; the object stage is driven by a main shaft of a worm gear; the power of a worm and gear system is provided by a motor; and an encoder provides a position feedback signal and forms a closed loop system with the motor to control the position of the object stage. The invention has the advantage of saving the works of adjusting the angle, the distance and the coaxality between the spherical mirror and the plane mirror for many times when the original Ritchey-Common test is used for testing the surface type of the plane mirror; and the whole system has simple structure, convenient use and good precision.
Description
technical field [0001] The invention relates to optical measurement technology, in particular to an integrated device for testing large-diameter plane mirrors by Common method, which is used for dynamic detection of large-diameter plane mirrors with a diameter exceeding 500mm. Background technique [0002] Among the instruments developed by the existing scientific research institutes, some scanning plane mirrors have a diameter of more than 500mm, and they all need to detect the surface shape during the assembly and adjustment process. Since the interferometers owned by general scientific research institutes have small apertures, they are not suitable for the detection of large flat mirrors. For this reason, a method of quantitative detection of large-diameter flat mirrors with a Common sphere rotating around the scanning mirror and a small-caliber interferometer is proposed. [0003] Since there is no special integrated device before, when the commonn method is used to det...
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IPC IPC(8): G01B11/24
Inventor 蒋丹杰孙胜利张朋军
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI