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Thin-film solar cell manufacturing system and common substrate storage rack

A thin-film solar cell and shared substrate technology, which is applied in semiconductor/solid-state device manufacturing, circuits, photovoltaic power generation, etc., can solve problems such as increasing installation space, and achieve the effects of reducing installation space, improving workability, and high cleanliness.

Inactive Publication Date: 2010-03-31
MITSUBISHI HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the size of the substrate cassette has to be increased, which is one of the main reasons for the increase in the installation space of each manufacturing process in the factory.

Method used

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  • Thin-film solar cell manufacturing system and common substrate storage rack
  • Thin-film solar cell manufacturing system and common substrate storage rack
  • Thin-film solar cell manufacturing system and common substrate storage rack

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Embodiment Construction

[0043]

Hereinafter, embodiments of the present invention will be described with reference to the drawings. image 3 It is a configuration diagram showing a thin-film solar cell manufacturing system according to the present embodiment. The thin-film solar cell manufacturing system 30 is installed in a thin-film solar cell factory and manufactures thin-film solar cells such as amorphous solar cells and tandem solar cells on substrates such as light-transmitting glass substrates. The thin-film solar cell manufacturing system 30 has a plurality of processing devices and a common substrate storage rack 40 ( 40 - 1 , 40 - 2 ) arranged in a general atmosphere environment room.

[0044]

The plurality of processing devices are devices used in the manufacturing process of thin-film solar cells. Here, as an example of a plurality of processing equipment up to module manufacturing, a substrate loading device 1, a substrate cleaning device 2, a transparent electrode film forming devic...

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Abstract

A thin-film solar cell manufacturing system enabling a reduction in the installation space in a factory. The thin-film solar cell manufacturing system comprises a first common substrate storage rack (40-1), a second common substrate storage rack (40-2), and plural processing devices (1 to 16-2). The first common substrate storage rack (40-1) and the second common substrate storage rack (40-2) store substrates at an angle. The plural processing devices (1 to 16-2) are each used for processing a substrate in the process of manufacturing a thin-film solar cell and disposed in a region between thefirst common substrate storage rack (40-1) and the second common substrate storage rack (40-2) such that either one of substrate carry-in and carry-out ports faces the first common substrate storagerack (40-1) and the other faces the second common substrate storage rack (40-2). The first common substrate storage rack (40-1) and the second common substrate storage rack (40-2) are shared among theplural processing devices (1 to 16-2).

Description

technical field [0001] The present invention relates to a thin-film solar cell manufacturing system and a common substrate storage rack used in thin-film solar cell manufacturing. Background technique [0002] Thin-film solar cells are known as solar cells. Thin film solar cells are mainly manufactured by modularization process and panelization process. In the modularization process, a transparent electrode layer, a photoelectric conversion layer, and a back electrode layer are formed on a glass substrate, and each layer is laser-etched to form a module by integrating the units. In the panelizing process, the module is covered with an adhesive sheet (EVA) and a back sheet and a terminal box is provided to constitute a panel. In this way, thin-film solar cells are manufactured through complicated processing steps using a plurality of processing apparatuses. [0003] As a system for manufacturing such a thin-film solar cell, a thin-film solar cell manufacturing system...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/20B65G49/06B65D85/86B65G1/00H01L21/673H01L21/677H01L31/04
CPCH01L21/67727H01L21/67718B65G2249/02B65G49/068H01L31/1876H01L21/67712B65G49/063B65G49/067B65G49/062Y02E10/50H01L21/67721B65G49/064H01L31/206
Inventor 秋山政记井上正志
Owner MITSUBISHI HEAVY IND LTD