Device and method for measuring volume ratio of vacuum container by linear vacuometer

A technology of vacuum container and vacuum gauge, which is applied in the field of measurement, can solve the problems of large influence on the measurement result of pressure change, large measurement uncertainty, and cannot be effectively prevented, so as to achieve small measurement uncertainty, simple method, and avoid unnecessary The effect of certainty

Active Publication Date: 2010-05-19
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The disadvantage of this method is the large uncertainty of the measurement results. The main reason is: when a capacitance film vacuum gauge is used as a comparator, the pressure in the container after expansion is measured and when it is connected with the piston pressure gauge, the pressure is adjusted by adjusting the piston. When the pressure gauge reproduces the previous indication value, it cannot effectively prevent the influence of temperature fluctuation on the accurate reproduction of the last recorded indication value of the capacitance film vacuum gauge, and cannot make full use of the linearity of the vacuum gauge. The measurement of each capacitance film vacuum gauge is not accurate. The degree of certainty is not less than 0.4%; ambient temperature fluctuations have a great influence on the measurement results of pressure changes

Method used

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  • Device and method for measuring volume ratio of vacuum container by linear vacuometer
  • Device and method for measuring volume ratio of vacuum container by linear vacuometer

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Embodiment 1

[0025] 1) Turn on the vacuum pump 10, open the vacuum valves 2, 4, 9, the plenum chamber 6 and each connecting pipeline are pumped into a vacuum state, and record the reading p' of the vacuum gauge 6 0 (3.305×10 -5 Pa).

[0026] 2) Close the valve 2, and enter the air into the plenum chamber 1 through the valve 7.

[0027] 3) Close the valve 7, adjust the fine-tuning valve 2, so that the gas flows into the vacuum containers 3 and 5 at a constant pressure, and when the reading of the vacuum gauge 6 no longer changes, record the reading p of the vacuum gauge 6 0 (5.967×10 1 Pa).

[0028] 4) Close the valve 4, open the valve 9, the container 5 is pumped into a vacuum state, and record the reading p' of the vacuum gauge 6 1 (8.634×10 -5 Pa).

[0029] 5) Close the valve 9, open the valve 4, let the gas enter the vacuum container 5, when the reading of the vacuum gauge 6 no longer changes, record the reading p of the vacuum gauge 6 1 (5.793×10 -1 Pa).

[0030] 6) The volume...

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Abstract

The invention discloses a device and a method for measuring a volume ratio of a vacuum container by a linear vacuometer, and belongs to the technical field of measurement. The device comprises a pressure stabilizing chamber, a vacuum valve, a container, a vacuometer, an air bottle and a vacuum pump. The vacuum container is vacuumized, and gas flows in the vacuum container; and the vacuum pressure is measured by the vacuometer. The device for measuring the volume ratio of the vacuum container by the linear vacuometer has a simple structure; because only one linear vacuometer is used, components causing measurement uncertainty are less; the linear vacuometer for measuring the vacuum degree is not required to measure absolute pressure, and a calibration coefficient thereof is not required to be known, so the uncertainty due to calibration is avoided; and the method for measuring the volume ratio of the vacuum container is simple, and has low measurement cost and small measurement uncertainty.

Description

technical field [0001] The invention relates to a device and method for measuring the volume ratio of a vacuum container by using a linear vacuum gauge, belonging to the field of measurement technology. Background technique [0002] The document "Measurement and Uncertainty Evaluation of Vacuum Standard Volume Ratio by Static Expansion Method, Vacuum and Cryogenics, Volume 14, Issue 3, 2008, Pages 143-145", introduces a method for measuring the volume ratio of vacuum vessels. The method is to use a piston pressure gauge to measure the pressure before and after expansion, and use a capacitance film vacuum gauge as a comparator. A high initial pressure is generated with a piston pressure gauge, and the pressure after expansion is displayed by a capacitive membrane vacuum gauge, and this indication is recorded. Then connect the piston pressure gauge to the capacitance film vacuum gauge, and let it generate a small pressure, so that the indication value of the capacitance film ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F17/00
Inventor 李得天徐婕张涤新冯焱郭美如魏万印
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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