Fixing device of photoelectric detector

A technology of photodetector and fixing device, which is applied in the direction of photolithography process exposure device, microlithography exposure equipment, etc., can solve the problems of inability to move the bottom sleeve 3 and the pressure plate 2, low installation accuracy, etc., and achieves high requirements for motion stability. , Small device scale, the effect of expanding the scope of application

Active Publication Date: 2010-06-02
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The detector in this technical solution is fixed in the bottom cover 3 and the pressure plate 2, and cannot move relative to the bottom cover 3 and the pressure plate 2. In ad

Method used

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  • Fixing device of photoelectric detector
  • Fixing device of photoelectric detector
  • Fixing device of photoelectric detector

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Embodiment Construction

[0025] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.

[0026] Please refer to figure 1 , figure 1 It is a schematic structural diagram of an alignment system of a photolithography apparatus in a preferred embodiment of the present invention.

[0027] In the light source module of the alignment system 200 in the lithography apparatus, the laser beam emitted by the light source 101 forms an illumination beam through the illumination optical system 102, the beam splitter 103, the objective lens 104 and the reflector 105 of the illumination module, and then enters the alignment mark 109 superior. The zeroth-order reflected light, ±1st-order diffracted light and scattered light of the alignment mark 109 are sequentially reflected by the mirror 105 , the objective lens 104 and the beam splitter 103 and enter the imaging optical path of the imaging module...

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PUM

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Abstract

The invention provides a fixing device of a photoelectric detector, which is used for fixing the photoelectric detector in a photoetching device. The photoelectric detector has a central axis with a detection surface at one end and a pin at the other end. The fixing device comprises a hollow round table, a fixed base and a top block, wherein the hollow round table is a cylindrical structure symmetrical about the central axis; the hollow round table coats the photoelectric detector; the radius of the outer surface of the hollow round table is evenly increased from the detection surface to the direction of the pin; the fixed base is fixed in the photoetching device and is provided with a wedge-shaped opening; the shape of the inner wall of the wedge-shaped opening corresponds to the outer surface of the hollow round table to coat the outer surface of the hollow round table; the top block comprises a pressing block and a fastening block which is locked in the fixed base and supports against the pressing block; and the pressing block supports against one end of the photoelectric detector provided with the pin and the hollow round table. The fixing device is suitable for fixing the photoelectric detector required to move continuously with high movement stability.

Description

technical field [0001] The invention relates to a fixing device, and in particular to a fixing device of a photodetector in a photolithography device. Background technique [0002] In the design process of the scanning lithography machine, the mask table and the workpiece table need to be equipped with an energy sensor to measure the energy density. There is a photodetector in the energy sensor, which converts the optical signal into an electrical signal to measure various indicators of the laser. . The detection surface of the photodetector is generally symmetrical about the optical axis of the scanning lithography machine system. [0003] The optimal detection surface of the photodetector mechanism is difficult to grasp and determine, and requires continuous testing and experimentation to be finally determined. On the basis of determining the optimal detection surface, a fixing device needs to be made to ensure that the photodetector can be replaced and its position can ...

Claims

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Application Information

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IPC IPC(8): G03F7/20
Inventor 苏海业
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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