Novel control mode for molecular pump power source of ion implanter

Abstract

The invention discloses a molecular pump power source controller applied to various novel ion implanters, and the ion implanters belong to the field of manufacturing semiconductor devices. The manufacture procedure of the present semiconductor chip is shorter and shorter, and the vacuum requirement on the ion implanter by the production line of the semiconductor chip is higher and higher. A part of high vacuum of the novel ion implanter is extracted by using the molecular pump, a domestic molecular pump power source controller cannot control the rotation speed of the molecular pump well, and although abroad products have excellent performance but the prices are very high. Therefore, the domestic molecular pump power source controller and the abroad products are unacceptable for most domestic manufacturers.

Description

technical field [0001] The patent of the present invention is a molecular pump power controller used on various types of ion implanters. The ion implanter belongs to the field of semiconductor device manufacturing, and the control method of the switch tube of the molecular pump power adopts pulse width modulation (PWM). The second-generation pulse width modulator SG3525 produced by Silicon General Electric Company drives the voltage regulator tube PIC646 and the high-frequency power amplifier tube. Other DC power supplies that drive high-frequency power switching tubes can also use SG3525. Background technique [0002] With the rapid development of the semiconductor field, the manufacturing process of semiconductor chips is getting smaller and smaller. Among them, the ion implanter is the key equipment that determines the chip manufacturing process. Now the 90nM ion implanter is the mainstream equipment in the large production line. The vacuum requirements for the ion implan...

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Problems solved by technology

[0003] The old-fashioned ion beam implanters developed in China do not require very high vacuum, and molecular pumps are expensive, so few use molecular pumps, while the latest ion implanters now have high requirements for vacuum and require the use of molecular pumps The power controller is used to control the molecular pump. Although the performance of the foreign molecular pump power controller is relatively good, the price is very high, which is unacceptable to most domestic manufacturers.

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