Six-dimensional pose measurement system of complete photoelectric type magnetic suspension workpiece table
A workpiece table and photoelectric technology, applied in the system field of mechanical and electronic technology, can solve the problems of large area occupied by the measurement system, small measurement range, long optical path of the laser interferometer, etc., and achieve the expansion of the measurement range, compact structure, and The effect of enhanced electromagnetic interference capability
Inactive Publication Date: 2011-06-08
SHANGHAI JIAOTONG UNIV
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Problems solved by technology
However, in this technology: 1) the optical path of the laser interferometer is long, which makes the measurement system occupy a large area; 2) limited by the length of the right-angle mirror installed on the workpiece table, its measurement range is small, generally smaller than the plane size of the workpiece table ; 3) The capacitive sensor is an analog electrical sensor, which is more susceptible to the interference of the inherent alternating electromagnetic field in the maglev workbench
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[0016] Such as figure 1 As shown, the present embodiment includes: a maglev workpiece table 1, a sensor group 2 and a six-dimensional coordinate derivation unit 3, wherein: the sensor group 2 is fixed on the maglev work table 1, and the input end of the sensor group 2 moves freely with the maglev work table 1 To collect the displacement direction and distance information of the maglev workpiece table 1, the output end of the sensor group 2 is connected to the six-dimensional coordinate derivation unit 3 to transmit the displacement direction and distance information of the maglev workpiece table 1, and the six-dimensional coordinate derivation unit 3 outputs the maglev workpiece table 1 The six-dimensional pose information of .
[0017] The sensor group 2 includes: two micro-image displacement sensors and three laser displacement sensors, wherein: the first micro-image displacement sensor 4, the second micro-image displacement sensor 5, the first laser displacement sensor 6, t...
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The invention discloses a six-dimensional pose measurement system of a complete photoelectric type magnetic suspension workpiece table, belonging to the technical field of mechanical electronics. The six-dimensional pose measurement system of the complete photoelectric type magnetic suspension workpiece table comprises a magnetic suspension workpiece table, a sensor group and a six-dimensional coordinate deriving unit, wherein the sensor group is fixed on the magnetic suspension workpiece table; the input end of the sensor group can freely move along with the magnetic suspension workpiece table to acquire the displacement direction and distance information of the magnetic suspension workpiece table, and the output end of the same is connected with the six-dimensional coordinate deriving unit and transmits the displacement direction and distance information of the magnetic suspension workpiece table; the six-dimensional coordinate deriving unit outputs the six-dimensional pose information of the magnetic suspension workpiece table; and the sensor group comprises two microimage sensors and three laser displacement sensors. The invention is used in the field of manufacturing equipment and robots, has small integral dimension of the system and compact structure, greatly expands the measurement range and enhances the anti-electromagnetic interference capacity by adopting a completephotoelectric type sensor.
Description
technical field [0001] The invention relates to a system in the technical field of mechatronics, in particular to a six-dimensional pose measurement system for an all-photoelectric magnetic levitation workpiece table. Background technique [0002] The magnetic levitation planar table is an XY table directly driven by electromagnetic force. Because it does not contain a mechanical transmission chain, it has the advantages of near zero friction, high response, and high precision. From the perspective of rigid body kinematics, the function of the maglev planar workbench can be described as: under the action of electromagnetic force, the worktable contained in it can track a given trajectory with a certain precision on the XY plane, and can The direction of the degree of freedom (including the yaw direction, the pitch direction, the heel direction and the Z direction) maintains fluctuations within a small range. [0003] The above functions of the maglev planar workbench cannot...
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IPC IPC(8): G01B11/02G01B11/00
Inventor 曹家勇王石刚冯磊董汉成朱文
Owner SHANGHAI JIAOTONG UNIV