Ultra-fine cone electrode array and method for manufacturing same
An electrode array and ultra-micro electrode technology, which is applied in the field of micro-sensing, can solve the problems affecting the use range of ultra-micro electrode array, lack of wide-scale popularization and application, high cost, etc., so as to reduce the difficulty of preparation, improve the aspect ratio and cost. low cost effect
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[0041] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0042] see figure 1 , the ultra-micro-cone electrode array of the present invention includes a single-sided polished silicon wafer 2 as a substrate, and the single-sided polished silicon wafer adopts p-Si (100) with a resistivity of 0.01-0.1Ω·cm, and the thickness of the substrate is 200 μm , and several groups of regular pyramidal pits with a taper angle of 70.52° in the silicon wafer 2, and a layer of SiO with inconsistent thickness covering the silicon wafer 2 and the regular quadrangular pyramidal pits 2 Thin film 3, on SiO 2 A layer of 400nm and patterned conductive metal film electrode material layer 4 is provided on the surface of the film 3, and a 700nm and patterned Si layer is provided on the conductive metal film electrode material layer 4. 3 N 4 protective film5.
[0043] The manufacture process of the present invention sees i...
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