Vertical magnetic recording medium, method for production thereof, and magnetic recording/reproduction device
A technology for perpendicular magnetic recording and media, which is applied in the directions of magnetic recording, data recording, and record carrier manufacturing. It can solve problems such as noise increase and achieve the effect of improving recording density characteristics.
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[0091] Place the glass substrate for HD in a vacuum chamber and evacuate the chamber to below 1.0 × 10 -5 Reduced pressure in Pa. A soft magnetic layer composed of CoNbZr and having a thickness of 50 nm was formed on a glass substrate, and then an underlying layer composed of NiFe having an fcc structure and having a thickness of 5 nm was formed on the soft magnetic layer. The soft magnetic layer and the underlying layer were formed under a reduced pressure of 0.6 Pa in an argon atmosphere by a sputtering method. An intermediate layer composed of Ru was formed on the underlying layer in two stages by a sputtering method in an argon atmosphere, that is, a Ru layer with a thickness of 10 nm was formed under a reduced pressure of 0.6 Pa in the first stage, and then The second stage further formed a Ru layer with a thickness of 10 nm under a reduced pressure of 10 Pa.
example 1-1
[0093] Example 1-1, 90(Co12Cr18Pt3Ru)-10(SiO 2 )
example 1-2
[0094] Example 1-2, 90(Co12Cr18Pt3Ru)-10(Cr 2 o 3 )
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