Low-frequency vibration isolator with three degrees of freedom

A degree of freedom and vibration isolator technology, applied in gas shock absorbers, springs/shock absorbers, springs, etc., to achieve good low-frequency vibration isolation and good vibration isolation.

Active Publication Date: 2010-09-15
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the vibration isolators with the best effect are air springs or permanent magnet springs. Air springs have a good

Method used

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  • Low-frequency vibration isolator with three degrees of freedom
  • Low-frequency vibration isolator with three degrees of freedom
  • Low-frequency vibration isolator with three degrees of freedom

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Embodiment Construction

[0016] The structure, principle and working process of the present invention will be further described below in conjunction with the accompanying drawings.

[0017] figure 1 Provide the present invention with a schematic diagram of the structural principle (main sectional view) of a low-frequency three-degree-of-freedom vibration isolator, which includes an air spring, an inner hollow cylindrical permanent magnet 2 and an outer hollow cylindrical permanent magnet 3, and the air spring Including an air spring main body 1 and a rubber piston 8, the air spring main body consists of an upper chamber 6, a lower chamber 7 and an orifice 5 communicating with the upper and lower chambers; the inner hollow cylindrical permanent magnet and the outer hollow cylindrical permanent magnet are the same The shaft is arranged, the outer hollow cylindrical permanent magnet is fixed on the top of the air spring main body, the inner hollow cylindrical permanent magnet is fixed on the rubber pisto...

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Abstract

The invention provides a low-frequency vibration isolator with three degrees of freedom, which relates to a vibration isolation device used for the precision field, the IC (integrated circuit) manufacturing field or the optical field. The vibration isolator comprises an air spring and a pair of hollow tubular permanent magnets, wherein the outer hollow tubular permanent magnet is fixed at the top of the main body of the air spring, and the inner hollow tubular permanent magnet is fixed on a rubber piston of the air spring, thereby realizing vibration isolation. The low-frequency vibration isolator can simultaneously realize low-frequency vibration isolation of multiple degrees of freedom, has good low-frequency vibration isolation effect, and has the advantages of few components, less mechanical wear, low cost, long service life, high accuracy and the like.

Description

technical field [0001] The invention relates to a vibration isolation device used in the precision field, the IC (integrated circuit) manufacturing field or the optical field, which is used for vibration isolation and avoids the impact of vibration on the precision of the device. Background technique [0002] Mechanical vibration will have a serious impact on product quality, operation accuracy, product life, production safety, environment and personal health. With the progress and development of society and the improvement of people's living standards, the requirements for vibration control are getting higher and higher. Vibration control methods mainly include vibration elimination, vibration isolation and vibration absorption, etc., but vibration isolation is the most widely used in mechanical systems. [0003] At present, there are several forms of vibration isolation mechanisms at home and abroad: laminated rubber, three-wire pendulum, inverted pendulum, X pendulum, sw...

Claims

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Application Information

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IPC IPC(8): F16F6/00F16F9/02
Inventor 朱煜徐登峰汪劲松李强张鸣尹文生杨开明纪春华许岩田丽
Owner TSINGHUA UNIV
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