Word line-sharing contactless SONOS split gate type flash memory
A split-gate flash memory and non-contact technology, which is applied in the direction of electrical components, electric solid-state devices, circuits, etc., can solve the problem of device programming voltage reduction, achieve device size reduction, small size, and avoid over-erasing effects
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[0026] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.
[0027] The present invention proposes a non-contact SONOS split-gate flash memory that shares word lines. The obtained flash memory device can effectively reduce the area of the chip while keeping the electrical isolation performance of the chip unchanged, and can also avoid over-erasing at the same time. problem of removal.
[0028] Please refer to figure 1 , figure 1 Shown is a schematic structural diagram of a non-contact SONOS split-gate flash memory sharing a word line in a preferred embodiment of the present invention. The present invention proposes a non-contact SONOS split-gate flash memory sharing a word line, which includes: a semiconductor substrate 10 with a source region 11 and a drain region 12 arranged at intervals thereon; a channel region 13 located at the source Between the e...
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