Method for preparing W-Ti alloy target material

An alloy target and alloy technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of uneven structure, high preparation cost and low density of W-Ti alloy, and achieve the preparation cost Low, uniform alloy structure, easy to implement

Inactive Publication Date: 2010-12-29
XIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a method for preparing a W-Ti alloy target, which solves the problems of uneven structure, low density, poor performance and high preparation cost of the W-Ti alloy prepared by the existing method

Method used

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  • Method for preparing W-Ti alloy target material
  • Method for preparing W-Ti alloy target material
  • Method for preparing W-Ti alloy target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] According to the mass percentage of the chemical composition of the W-Ti alloy, W:Ti=79%:21%, the W powder with a particle size of 1-30 μm and a purity higher than 99.9% and the W powder with a particle size of 10-30 μm, TiH with a purity higher than 96.7% 2 powder. Then TiH 2 The powder is loaded into a roller milling tank, and the added mass is TiH 2 Powdered 1.5% absolute ethanol is used as a process control agent, and argon gas is passed into the ball mill tank to remove the air in the tank, then the ventilation is stopped and the ball mill tank is sealed for ball milling; WC balls are selected as the grinding balls, and the ball-to-material ratio is 40: 1. Milling for 48 hours, the rotating speed of the ball milling tank was 200r / min; during the milling process, the outer wall of the ball milling tank was always cooled by circulating water. Ball milled TiH 2 The powder is mixed with W powder, and the mixing time is 4 hours. The mixed powder was put into a cold...

Embodiment 2

[0049]According to the mass percentage of the chemical composition of the W-Ti alloy as W:Ti=90%:10%, W powder with a particle size of 1-30 μm and a purity higher than 99.9% and a particle size of 10-30 μm, TiH with a purity higher than 96.7% 2 powder. Then TiH 2 The powder is loaded into a roller milling tank, and the added mass is TiH 2 Powdered 1.5% absolute ethanol is used as a process control agent, and argon gas is passed into the ball mill tank to remove the air in the tank, then the ventilation is stopped and the ball mill tank is sealed for ball milling; WC balls are selected as the grinding balls, and the ball-to-material ratio is 30: 1. The milling time was 36 h, and the rotating speed of the milling tank was 200 r / min. During the milling process, the outer wall of the milling tank was always cooled by circulating water. Ball milled TiH 2 The powder is mixed with W powder, and the powder mixing time is 6 hours. Then the mixed powder was put into a cold isostati...

Embodiment 3

[0051] According to the mass percentage of the chemical composition of the W-Ti alloy as W:Ti=70%:30%, W powder with a particle size of 1-30 μm and a purity higher than 99.9% and a particle size of 10-30 μm, TiH with a purity higher than 96.7% 2 powder. Then TiH 2 The powder is loaded into a roller milling tank, and the added mass is TiH 2 Powdered 1.5% absolute ethanol is used as a process control agent. First, vacuumize the ball mill tank and then pass in argon to ensure that the air in the tank is completely removed. Then stop vacuuming and argon and seal the ball mill tank for ball milling; WC balls are grinding balls, the ball-to-material ratio is 35:1, the milling time is 40 h, and the rotational speed of the ball milling tank is 200r / min; during the milling process, the outer wall of the ball milling tank is always cooled by circulating water. Ball milled TiH 2 The powder is mixed with W powder, and the powder mixing time is 10h. The mixed powder was put into a col...

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Abstract

The invention discloses a method for manufacturing a W-Ti alloy target material. In the method, W powder with purity higher than 99.9 percent and TiH2 powder with purity higher than 96.7 percent are used as raw materials, the TiH2 powder is subjected to high-energy ball milling and then is mixed with the W powder; then, the powder is compacted for 3 to 6 minutes at the pressure of between 250 and 280MPa, and the compact blank is subjected to vacuum loose sintering, and the sintered alloy is subjected to solution annealing and quenching; and finally, machining the W-Ti alloy to obtain the target finished product. Compared with the prior art, the method has low sintering temperature and does not have pressure in the sintering process, and the prepared alloy target material has the advantages of uniform tissue, high compactness and large controllable size.

Description

technical field [0001] The invention belongs to the technical field of metallurgical preparation, and in particular relates to a preparation method of a W-Ti alloy target. Background technique [0002] W-Ti alloy is one of the leading materials for preparing the diffusion barrier layer of Cu and Ag wiring in microelectronic materials. At present, the main preparation methods of W-Ti alloy targets are hot pressing and hot isostatic pressing. The target prepared by the hot pressing method is limited by the size of the hot pressing mold, and there is a phenomenon of uneven temperature distribution, which affects the uniformity of the alloy structure; while the hot isostatic pressing method can obtain a target with a density close to 100%. But the equipment is complicated and the cost is high. Therefore, it is of practical significance to develop a preparation method of W-Ti alloy target with lower cost and superior performance. Contents of the invention [0003] The purpos...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C1/04C22C27/04C23C14/14B22F3/16
Inventor 梁淑华王庆相陈鑫邹军涛王献辉
Owner XIAN UNIV OF TECH
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