System and method for testing lens parameters based on Hartmann-Shark sensor

Abstract

The invention relates to a system and a method for testing lens parameters based on a Hartmann-Shark sensor. The method comprises the following steps of: by injecting a reference beam to a tested lens, detecting a light wave front which is emitted from a tested lens by using a wave-front sensor; reconstructing the light wave front; calculating a convergence / radiation center of the light wave front, thereby obtaining the positions of the focus length, a focal point and a principal plane of a positive / negative lens; obtaining the positions of the focus length, the focal point and the principal plane in different wavelengths by using different wavelengths of incident lights enter the tested lens; carrying out wave front analysis on the reconstructed and reduced wave front; according to a wave front superposition principle, expanding the tested wave front into a superposition mode of an aberration element by using a least square method, wherein each aberration element corresponds to a weight factor in a certain size; and obtaining lens aberration distribution condition by discussing the distribution of the weight factors. The invention can completely inspect focus length parameters and aberration quality of the lens, is combined with an adjustable-wavelength laser, can measure chromatic aberration and inspects the change condition of the lens focus length and the aberration distribution under different wavelength conditions.

Description

technical field [0001] The invention relates to an automatic detection device, in particular to a lens parameter testing system and method based on a Hartmann-Shack sensor. Background technique [0002] Focal length is one of the most important parameters of a lens. For a lens, the accuracy of focal length and focus measurement will greatly affect its application effect and even determine its application success or failure. Due to the existence of chromatic aberration, when the lens is designed and manufactured, its design focal length and aberration are often only optimized for one or a few wavelengths. The design wavelength is somewhat different, which reduces the use effect of the lens to a certain extent. In addition, limited by the manufacturing process, there are unavoidable differences in the quality of parameters between batches of lenses manufactured and between individual lenses. If such differences cannot be grasped in advance, then the lens The application, esp...

AI Technical Summary

Problems solved by technology

[0004] The present invention aims at the problem of single parameters and complex operation of the current testing equipment, and proposes a lens parameter testing system and method based on the Hartmann-Shack sensor, which can measure the corresponding parameters of the lens for different incident wavelengths. It is an optical detection system that can measure the chromatic aberration, spherical aberration, coma, astigmatism and high-order aberration of the lens, and also has the characteristics of simplicity and ease of operation.

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