Method for plating easily-oxidized film on micro-size granules through magnetic control sputtering

Abstract

The invention discloses a method for plating an easily-oxidized film on micro-size granules through magnetic control sputtering. In the method, the dispersion of powder and the growth and encapsulation of the easily-oxidized film under ultralow oxygen partial pressure are completed by using equipment such as a vacuum cavity, a vacuum system, a magnetic control sputtering film plating system, a vibration sieve, a power supply and the like so as to obtain the micro-size granules on which the easily-oxidized film is plated finally. A single layer or multiple layers of laminated films are plated on the surfaces of the micro-size granules through a certain process, so that the micro-size granules have the properties of the original composition materials and have the characteristics of plating materials; therefore, the micro-size granules have the wide application prospects in each industry.

Description

technical field

[0001] The invention relates to a preparation and preservation technology of an easily oxidizable metal thin film, in particular to the technology of growing Al, Fe, Co, Ni, Cu easily oxidizable thin films on micro-nano particles and the packaging technology of samples. Background technique

[0002] Due to the characteristics of small volume and large specific surface area, microparticles have many advantages that bulk materials do not have, mainly surface effect and volume effect. As the volume decreases and the specific surface area increases, the effects of catalysis and adsorption associated with the surface properties will be significantly enhanced, and the magnetic, electrical, and optical properties will also change significantly as the volume decreases. The microparticle surface film is a material composed of several different types of granular materials such as non-polar non-metallic, metal or organic polymers, which are coated with a single layer or...

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