Planar gas sensor and manufacturing method thereof

A technology of a gas sensor and a manufacturing method, which is applied in the direction of gaseous chemical plating, manufacturing microstructure devices, and a process for producing decorative surface effects, etc., can solve problems such as difficulties in process realization, and achieve improved consistency and interchangeability, The effect of reducing the difficulty of manufacturing process

Inactive Publication Date: 2011-02-16
郑州炜盛电子科技有限公司
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This method is difficult to implement because it needs to make thro

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  • Planar gas sensor and manufacturing method thereof
  • Planar gas sensor and manufacturing method thereof
  • Planar gas sensor and manufacturing method thereof

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[0031] The invention provides a planar gas sensor and a manufacturing method thereof, so as to simplify the structure and manufacturing process of the gas sensor under the premise of ensuring the stability and reliability at high temperature.

[0032] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0033] See figure 1 , figure 1 It is a schematic structural diagram of a planar gas sensor provided by an embodiment of the present invention.

[0034] Among them, 1 is a substrate, 2 is a heating res...

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Abstract

The invention discloses a planar gas sensor which comprises a casing and a gas sensor positioned in the casing. The gas sensor comprises a substrate as well as a heating resistive layer and a gas sensing layer sequentially arranged at the front of the substrate, and the heating resistive layer and the gas sensing layer are separated by an insulating medium layer. The invention also discloses a manufacturing method of the planar gas sensor. The manufacturing method comprises the following steps of: screen printing heating parallel strap-shaped gold electrodes; screen printing the heating resistive layer; overprinting the heating electrodes on the heating resistive layer; screen printing the gas sensing layer on the insulating medium layer; screen printing a gas sensing layer detection electrode on the insulating medium layer so as to form the gas sensor; and welding the gas sensor on a tube socket. In the planar gas sensor provided by the invention, the heating resistive layer and the gas sensing layer of the gas sensor are arranged at the same side of the substrate, thus through holes are not needed to be prepared for introducing the electrodes to the same side, and then the difficulty of the production process of the gas sensor is greatly reduced.

Description

technical field [0001] The invention relates to the technical field of gas detection, and more specifically, to a planar gas sensor and a manufacturing method thereof. Background technique [0002] Gas detection technology plays an important role in the national economy. At present, there are many methods and means of gas detection, mainly including electrochemical method, gas chromatography, thermal conductivity method, infrared absorption method, contact combustion method, semiconductor gas sensor detection method, but from the material From the perspective of the scope of application, popularity and practicability, the semiconductor gas sensor detection method is the most widely used. Semiconductor gas sensors include resistive semiconductor gas sensors and non-resistive semiconductor gas sensors, in which resistive semiconductor gas sensors detect gas concentrations by using their resistance changes. [0003] Resistive semiconductor gas sensor is under certain condition...

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Application Information

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IPC IPC(8): B81C1/00G01N27/12
Inventor 张小水钟克创祁明锋申纪伟高胜国
Owner 郑州炜盛电子科技有限公司
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