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Pure-phase spatial light modulator based on metasurface

A spatial light modulator, pure phase technology, applied in instruments, optics, nonlinear optics, etc., to avoid inherent process errors, avoid the limitation of preparation accuracy, and reduce the difficulty of the preparation process

Pending Publication Date: 2020-12-29
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although metasurfaces have been successfully applied to static optical elements, there is still a high demand for using metasurfaces to dynamically modify the phase of incident light.

Method used

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Embodiment 1

[0036] A metasurface-based phase-only spatial light modulator disclosed in an embodiment of the present invention, figure 1 It is a structural schematic diagram of a phase-only spatial light modulator based on a metasurface in an embodiment of the present invention. The structure includes a lower substrate and an upper substrate arranged in sequence; the upper substrate and the lower substrate are filled with a double substrate with a dynamic phase modulation function. Refractive materials; the lower substrate includes a substrate with pixel voltage modulation capability and a nanostructure array distributed on the substrate; the nanostructures in the nanostructure array have different sizes and shapes, and the spatial distribution is not uniform. By changing the geometric structure of the nanostructures at different positions The size can change the phase modulation amount generated by the nanostructure array to realize the static phase modulation function; the phase modulatio...

Embodiment 2

[0056] A metasurface-based phase-only spatial light modulator disclosed in an embodiment of the present invention, Figure 5 It is a structural schematic diagram of a phase-only spatial light modulator based on a metasurface in this embodiment. The structure includes a lower substrate and an upper substrate arranged in sequence; the upper substrate and the lower substrate are filled with birefringence with dynamic phase modulation function. Materials; the lower substrate includes a substrate with pixel point voltage modulation capability and a nanostructure array distributed on the substrate; the nanostructures in the nanostructure array have different sizes and shapes, and the spatial distribution is not uniform; the upper substrate is prepared in the surface facing the birefringence material There is an orientation layer. The nanostructure array described above can realize the color filtering function, and the birefringent material layer can realize the dynamic phase modulat...

Embodiment 3

[0064] A metasurface-based phase-only spatial light modulator disclosed in an embodiment of the present invention, Figure 7 It is a structural schematic diagram of a phase-only spatial light modulator based on a metasurface in this embodiment. The structure includes a lower substrate and an upper substrate arranged in sequence; the upper substrate and the lower substrate are filled with birefringence with dynamic phase modulation function. Materials; the lower substrate includes a substrate with pixel point voltage modulation capability and a nanostructure array distributed on the substrate; the size and shape of the nanostructures in the nanostructure array are different, and the spatial distribution is not uniform. By changing the geometric structure size of the nanostructures at different positions The phase modulation amount generated by the nanostructure array can be changed to realize the static phase modulation function; the phase modulation results of the birefringence...

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Abstract

The invention discloses a pure-phase spatial light modulator based on a metasurface. The pure-phase spatial light modulator comprises a lower substrate and an upper substrate, and the portion betweenthe upper substrate and the lower substrate is filled with a birefringent material with a dynamic phase modulation function; the lower substrate comprises a substrate with pixel point voltage modulation capability and a nano-structure array distributed on the substrate; the sizes and shapes of nanostructures in the nano-structure array are different, spatial distribution is uneven, the phase modulation amount generated by the nano-structure array can be changed by changing the geometric structure sizes of the nanostructures at different positions, and the static phase modulation function is achieved; phase modulation results of the birefringent material and the nanostructures are independent of each other; and an orientation layer is prepared in the surface, facing the birefringent material, of the upper substrate. The pure-phase spatial light modulator based on the metasurface effectively integrates a pixelated liquid crystal dynamic phase modulation function and a static phase modulation function of a nano-structure array metasurface.

Description

technical field [0001] The invention relates to a metasurface-based pure phase spatial light modulator, which belongs to the field of optoelectronic devices. Background technique [0002] Spatial light modulator (spatial light modulator, SLM) is a device used for light field regulation. It is based on Fourier optics and can perform photoelectric reproduction of the target light field by loading a computational hologram. Under the control of the input signal, the spatial light modulator can modulate the amplitude, phase and polarization of the incident light in real time. [0003] Phase-only spatial light modulators are able to adjust the phase delay of the light field reflected from each pixel without changing the light field intensity, which is usually achieved by changing the thickness or refractive index of the device. Due to the special photoelectric effect of liquid crystals, a liquid crystal spatial light modulator has been developed, which can change the orientation ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/1337G02F1/139
CPCG02F1/133753G02F1/133788G02F1/1393
Inventor 张昊杨可杨夏军
Owner SOUTHEAST UNIV
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