Microscopic white light interferometry-based nano probe device

Abstract

The invention discloses a microscopic white light interferometry-based nano probe device, which comprises an interference microscope body, a reference objective lens, a reflector, a measurement objective lens, a micro-cantilever probe and a charge coupled device (CCD) detector. After white light in the interference microscope body is split, a part of white light is converged onto the reflector at the top of the tip of the micro-cantilever probe by the measurement objective lens and is reflected to enter the interference microscope body, while the other part is projected onto the reflector by the reference objective lens, reflected back into the interference microscope body and converged with the white light reflected by the reflector at the top of the tip of the micro-cantilever probe to generate white light interference fringes; and the interference fringes are magnified by a magnifier in the interference microscope body and then are imaged on an imaging plane of the CCD detector. The invention has the characteristics of simple structure, capacity of realizing the simultaneous measurement of a plurality of probes, high measurement accuracy and low cost, and can be used for measuring micron-size displacement, surface appearance, structures and the like with the resolution of 1 nanometer.

Description

technical field [0001] The invention belongs to the detection technology of a probe displacement signal of a scanning probe microscope, and in particular relates to a nanometer probe device based on microscopic white light interference. Background technique [0002] Scanning probe microscope is a surface measurement instrument with extremely high resolution and many advantages. It is an important basis for the development of nanotechnology and has a wide range of applications. [0003] Most of the existing scanning probe microscopes use the optical lever detection method to detect the deflection of the micro-cantilever scanning probe under force, and the deflection is detected by a four-quadrant photodiode, that is, the tiny displacement of the cantilever probe tip is transformed into The center of the laser spot has a large deflection from the center of the spot on the four-quadrant photodiode optical signal receiving surface. By measuring the deflection of the center of th...

AI Technical Summary

Problems solved by technology

In addition, the two are similar to the general scanning probe microscope, and there are two problems: (1) there is only one probe, the measurement efficiency is low, and multiple probes cannot be measured simultaneously

(2) It cannot be directly used to observe the measured area. Before the measurement, it is necessary to use the auxiliary observation device to locate the measured area, and then perform subsequent measurements.

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