Capacitance pressure sensor with high Q value and large relative variable quantity

A pressure sensor and capacitance technology, applied in the direction of fluid pressure measurement using capacitance changes, etc., can solve the problems of reduced deformation of the vibrating membrane, reduced deformation, no attention to the relative change of capacitance and Q value, etc., to achieve a large relative capacitance change Quantity, high quality factor effect
CN102052989AInactive Publication Date: 2011-05-11HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
HUAZHONG UNIV OF SCI & TECH
Publication Date
2011-05-11
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a capacitance pressure sensor which is used for wireless and passive measurement. A capacitor is composed of an elastic vibrating diaphragm of which the periphery is fixedly supported; by means of adjusting the ratio of the radium of a circular electrode to the radius of the vibrating diagram and arranging insulated salient points and the like, the vibrating diagram is in a large strain state; and the ratio of the maximum capacitance to the initial capacitance is as big as possible so as to obtain the capacitance with high Q value and large relative variable quantity. After being connected with a surface acoustic wave transmitter, the capacitance pressure sensor with high Q value and large relative variable quantity can realize wireless and passive high-precise measurement on pressure and can be used for the monitoring field of automobile tyre pressure.
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Description

Technical field:

[0001] The invention belongs to the technical field of pressure monitoring, and in particular relates to a pressure sensor suitable for passive wireless sensing, especially a capacitive pressure sensor with variable pole distance. technical background:

[0002] Sensors that work in a passive wireless manner are suitable for harsh working environments, such as high temperature, heavy pollution, strong interference, etc., as well as various physical, chemical or biological conditions that are not suitable for wiring and battery-provided energy on rotating and moving objects Quantity measurement. There are mainly two types of sensors working in a passive wireless manner in the prior art: LC resonance type and SAW (surface acoustic wave) type. The former generally adopts a capacitive sensor, takes the resonant frequency as the measurement quantity, and realizes energy and information transmission by inductive coupling, and adapts to a shorter working distance. ...

Claims

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