Capacitance pressure sensor with high Q value and large relative variable quantity

A pressure sensor and capacitance technology, applied in the direction of fluid pressure measurement using capacitance changes, etc., can solve the problems of reduced deformation of the vibrating membrane, reduced deformation, no attention to the relative change of capacitance and Q value, etc., to achieve a large relative capacitance change Quantity, high quality factor effect

Inactive Publication Date: 2011-05-11
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
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Problems solved by technology

[0007] The above-mentioned patent documents cover the electrode with an insulating material layer to solve the problem of electrode short circuit, but it also produces the problem that the deformation of the vibrating membrane is reduced under the action of external pressure, that is

Method used

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  • Capacitance pressure sensor with high Q value and large relative variable quantity
  • Capacitance pressure sensor with high Q value and large relative variable quantity
  • Capacitance pressure sensor with high Q value and large relative variable quantity

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Embodiment Construction

[0030] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0031] The capacitive pressure sensor of the present invention comprises a circular elastic vibrating diaphragm 1, a circular elastic vibrating diaphragm or base 2, rings 3 and 4 made of sealing materials, circular metal film electrodes 5 and 6, metal film leads in the electrodes Lines 7 and 8, outer metal film electrodes 9 and 10, and a plurality of insulating material bumps 11

[0032] The circular elastic vibrating diaphragm 1, the circular elastic vibrating diaphragm or the base 2 adopts a bonding process so that its edges are bonded to the sealing rings 3, 4 to form an elastic film fixed around the periphery, as a detection Deformable parts under pressure. Diaphragm materials include, but are not limited to, alumina ceramics.

[0033] The circular rings 3 and 4 made of the sealing material are located between the circular elastic vibrati...

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Abstract

The invention discloses a capacitance pressure sensor which is used for wireless and passive measurement. A capacitor is composed of an elastic vibrating diaphragm of which the periphery is fixedly supported; by means of adjusting the ratio of the radium of a circular electrode to the radius of the vibrating diagram and arranging insulated salient points and the like, the vibrating diagram is in a large strain state; and the ratio of the maximum capacitance to the initial capacitance is as big as possible so as to obtain the capacitance with high Q value and large relative variable quantity. After being connected with a surface acoustic wave transmitter, the capacitance pressure sensor with high Q value and large relative variable quantity can realize wireless and passive high-precise measurement on pressure and can be used for the monitoring field of automobile tyre pressure.

Description

Technical field: [0001] The invention belongs to the technical field of pressure monitoring, and in particular relates to a pressure sensor suitable for passive wireless sensing, especially a capacitive pressure sensor with variable pole distance. technical background: [0002] Sensors that work in a passive wireless manner are suitable for harsh working environments, such as high temperature, heavy pollution, strong interference, etc., as well as various physical, chemical or biological conditions that are not suitable for wiring and battery-provided energy on rotating and moving objects Quantity measurement. There are mainly two types of sensors working in a passive wireless manner in the prior art: LC resonance type and SAW (surface acoustic wave) type. The former generally adopts a capacitive sensor, takes the resonant frequency as the measurement quantity, and realizes energy and information transmission by inductive coupling, and adapts to a shorter working distance. ...

Claims

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Application Information

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IPC IPC(8): G01L9/12
Inventor 周东祥傅邱云龚树萍罗为郑志平赵俊王建玲
Owner HUAZHONG UNIV OF SCI & TECH
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