Atmospheric pressure non-thermal plasma brush generator and array combination thereof
A low-temperature plasma and generating device technology, applied in the direction of plasma, electrical components, etc., can solve the problems of high plasma flow temperature and difficult industrial application, so as to eliminate thermal instability factors and prevent glow discharge from turning into arc discharge , good natural cooling effect
Active Publication Date: 2012-12-19
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology
[0005] The purpose of the present invention is to provide an atmospheric pressure low-temperature plasma brush generator to solve the problem that the high temperature of the plasma flow generated by the atmospheric pressure plasma generator in the prior art requires additional configuration of a cooling system, which makes it difficult to apply in actual industry The problem
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[0027] The atmospheric pressure low temperature plasma brush generating device provided by the invention is composed of a main body chamber, two electrodes, a ballast resistor, a mass flow meter and a power supply device. The main body chamber includes two ports, one port is an air inlet port, and the other port is an air outlet port, and the part of the main body chamber close to the air outlet port naturally forms a slit cavity. Inside the main chamber, two electrodes are arranged adjacent to the gas outlet port, and the two electrodes are facing and fixed on the walls on both sides of the main chamber. One of the electrodes is connected to a ballast resistor. The main chamber is made of polymer or insulating ceramic materials such as polytetrafluoroethylene; the electrodes are heat-resistant metal materials, and these metals include tungsten, nickel, tantalum, platinum and alloys of these metals, but not Limited to the above materials. The end surfaces facing the two elec...
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The invention discloses an atmospheric pressure non-thermal plasma brush generator and array combination thereof in order to solve the following problem in the prior art: cooling systems need to be additionally configured because the gas flow temperature of the plasmas generated when the atmospheric pressure plasma generators work is higher, thus the generators are hard to be applied in the practical industry. The brush generator comprises a main chamber and two electrodes, wherein the main chamber is provided with an air inlet and an air outlet in a shape of narrow gap; a narrow gap chamber is naturally formed on the part close to the air outlet, in the main chamber; and the discharge ends of the two electrodes are arranged in the narrow gap chamber. The brush generator has the followingadvantages: the brush generator can generate plasmas at atmospheric pressure; and the structural design is diversified, the cost is low, the brush generator is safe and convenient to operate, and theobjects with large areas or complex contour structures are easier to treat by the brush generator compared with the traditional low pressure plasma generators.
Description
technical field [0001] The invention relates to an atmospheric-pressure low-temperature plasma brush generating device and an array combination thereof, which are often used in equipment in the fields of material surface cleaning, material property improvement, sterilization, and environmental purification. Background technique [0002] In recent years, plasma technology (plasma treatment process) has been widely used in industrial fields such as semiconductor manufacturing, surface cleaning and improvement of material materials, and sterilization. The successful application of plasma technology in the above-mentioned many industrial fields is due to the non-equilibrium characteristics of plasma. In the non-equilibrium plasma system, there are a large number of low-temperature chemically active species. When these active species are in contact with the surface of other substances, they can improve the surface properties of the substances without affecting the overall propert...
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IPC IPC(8): H05H1/30
Inventor 段忆翔赵卫汤洁
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI