Flexible electrothermal drive micro-gripper and manufacturing process method

Abstract

The invention discloses a flexible electrothermal drive micro-gripper and a manufacturing process method, belongs to a micro-actuator in the technical field of micro-electro-mechanical systems and in particular relates to a flexible electrothermal drive micro-gripper and a manufacturing process method thereof. The micro-gripper is of an integral structure with two parts (a driving part and a flexible mechanism of a gripper body) and comprises an SU-8 adhesive structure layer, an upper electrode metal layer and a lower electrode metal layer; and furthermore, the left structure and the right structure are symmetrical completely. An inverted V-shaped beam array is utilized as the driving part, and the part of the flexible mechanism of the gripper body is a 10-rod flexible mechanism. The manufacturing process method comprises the steps of oxidation, adhesive coating, exposure, development, corrosion and sputtering of metal. The temperature at the gripping end of the micro-gripper is lower, the three-layer symmetrical structure is adopted, and bending in normal direction can be avoided during the gripping process. The flexible mechanism in the micro-gripper has a novel structure, the motion magnification factor is large, and the range of sizes of gripped objects is wide; and furthermore, due to the integral structure, the assembly is unnecessary, the manufacturing is simple, and the micro-gripper and the manufacturing process method are conductive to realizing the practicality of a biological micro-operation technology.

Description

technical field [0001] The invention belongs to micro-actuators in the technical field of micro-electro-mechanical systems, and in particular relates to a flexible electrothermally driven micro-clamp and a manufacturing process thereof. Background technique [0002] With the rapid development of biotechnology, the research on tiny tissues and cells of organisms has become a hot spot. The research and development of micro-clamps suitable for biological micro-manipulation, which can conveniently hold tiny tissues and cells, is an important factor in promoting the development of biotechnology, so it has become a research hotspot in the field of MEMS technology in recent years. [0003] At present, the driving methods of micro clamps mainly include: electrostatic type, electromagnetic type, hydraulic type and electric heating type. Compared with other driving methods, electrothermal driving has the advantages of large driving force and displacement, low driving voltage and simp...

AI Technical Summary

Problems solved by technology

The driver of the Λ-shaped beam array-driven micro clamp is far away from the clamping end, and the temperature of the clamping end is low. However, due to the asymmetrical distribution of the metal layer and the SU-8 structural layer, the clamp body has a normal bending after the voltage is applied, which affects the operation.

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