The invention discloses a flexible electrothermal drive micro-gripper and a manufacturing process method, belongs to a micro-actuator in the technical field of micro-electro-mechanical systems and in particular relates to a flexible electrothermal drive micro-gripper and a manufacturing process method thereof. The micro-gripper is of an integral structure with two parts (a driving part and a flexible mechanism of a gripper body) and comprises an SU-8 adhesive structure layer, an upper electrode metal layer and a lower electrode metal layer; and furthermore, the left structure and the right structure are symmetrical completely. An inverted V-shaped beam array is utilized as the driving part, and the part of the flexible mechanism of the gripper body is a 10-rod flexible mechanism. The manufacturing process method comprises the steps of oxidation, adhesive coating, exposure, development, corrosion and sputtering of metal. The temperature at the gripping end of the micro-gripper is lower, the three-layer symmetrical structure is adopted, and bending in normal direction can be avoided during the gripping process. The flexible mechanism in the micro-gripper has a novel structure, the motion magnification factor is large, and the range of sizes of gripped objects is wide; and furthermore, due to the integral structure, the assembly is unnecessary, the manufacturing is simple, and the micro-gripper and the manufacturing process method are conductive to realizing the practicality of a biological micro-operation technology.