Multi-layer air flow cooled output mirror device of laser

Abstract

The invention discloses a multi-layer air flow cooled output mirror device of a laser, which belongs to the field of high-power pulsed gas lasers. The device comprises a plurality of output mirrors, a plurality of ring gaskets and a mounting seat, wherein the thicknesses of the output mirrors are the same; a reflecting film is plated on a part of one surface of one output mirror; an anti-reflection film is plated on the other surface of the reflecting film; anti-reflection films are plated on the two surfaces of the other output mirrors; the output mirrors are coaxially arranged in parallel; the output mirror on which the reflecting film is plated is arranged on a working cavity side of the laser; the surface on which the reflecting film is plated faces a concave completely reflecting mirror of an optical resonant cavity; the output mirrors on the two surfaces of which the anti-reflection films are plated are sequentially arranged and the outmost sides of the output mirrors contact the atmosphere; every two of the plurality of output mirrors are separated by the ring gaskets; the contact faces between the ring gaskets and the output mirrors are sealed; the sealed output mirrors are fixed on the working cavity of the laser through the mounting seat; and sealed circulating cooling air flow is formed in a sealed space between two output mirrors. The multi-layer air flow cooled output mirror device reduces the degree of the damage of laser to an output mirror material body and prolongs the service life period of the output mirror material body.

Description

technical field [0001] The invention relates to a high-power pulsed gas laser, in particular to an output mirror structure of the pulsed gas laser with an average power of more than several thousand watts. Background technique [0002] Most gas lasers (such as CO 2 , CO, N 2 , excimer, etc.) The working principle is: use the discharge excitation method to invert the number of particles in the gas working medium, generate spontaneous emission and stimulated emission, and set an optical resonant cavity with a certain structure on both sides of the excitation area, so that the stimulated The radiation can be repeatedly oscillated and amplified to form a laser directional output. The optical resonant cavity is generally composed of two mirrors. High-power pulsed gas lasers mostly use "flat-concave" optically stable cavity, one of which is a concave spherical total reflection mirror made of Cu, and the other is a planar partial reflection mirror made of ZnSe. The mirror is the...

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Problems solved by technology

[0005] In order to solve the problem of damage to the material body caused by the heat of the core being difficult to dissipate as soon as possible due to the thick output mirror, the present invention provides a multi-layer airflow cooling laser output mirror device

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