Carbon nano tube thin film three-electrode hydrogen sensor and concentration measuring method by utilizing same
A carbon nanotube film and three-electrode technology, which is applied in the field of gas sensing, can solve the problems of low sensitivity, large discharge voltage and discharge current, and no concentration measurement, and achieve the effect of accurate measurement and high sensitivity
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Embodiment 1
[0037] Such as Figure 4 , Figure 5 As shown, the carbon nanotube thin film three-electrode hydrogen sensor consists of three electrodes stacked one after another from top to bottom, and the three stacked electrodes are respectively provided with a first electrode 1, a second electrode 2 and a third electrode 3. The first electrode 1 is composed of a substrate 5 with a carbon nanotube film 6 distributed on the inner surface and an electrode 4 with air holes; the second electrode 2 is composed of a lead-out electrode plate with a lead-out hole in the center ; The third electrode 3 is composed of collectors with blind holes on the electrode plate surface; the three electrodes are separated from each other by insulating pillars 7 .
[0038] Figure 4 In the shown embodiment of the carbon nanotube film three-electrode hydrogen sensor, there are two vent holes on the electrode surface of the first electrode 1, and the vent holes are circular; a carbon nanotube film is bonded to ...
Embodiment 2
[0046] The basic structure of this embodiment is the same as that of Embodiment 1, the difference is that the electrode spacing between two adjacent electrodes in the three electrodes of the carbon nanotube film three-electrode hydrogen sensor is 250 μm and 30 μm respectively, and the first electrode 1 and the second electrode 2 polar plates facing area is 0.01mm 2 , the area of the plate facing the second electrode 2 and the third electrode 3 is 0.01mm 2 .
[0047] There is one vent hole on the electrode surface of the first electrode 1, and the vent hole is quadrilateral, pentagonal or hexagonal; the second electrode 2 has 4 center lead-out holes, and the lead-out holes are quadrilateral, pentagonal or hexagonal ; The number of blind holes in the third electrode 3 is 4, and the blind holes are 3-6 prisms or pyramids.
[0048] The detection method of the present embodiment is basically the same as embodiment 1, the difference is:
Embodiment 3
[0051] The basic structure of this embodiment is the same as that of Embodiment 1, the difference is that the electrode spacing between two adjacent electrodes in the three electrodes of the carbon nanotube film three-electrode hydrogen sensor is 250 μm and 30 μm respectively, and the first electrode 1 and the second electrode 2 polar plates facing area is 10mm 2 , the area of the plates facing the second electrode 2 and the third electrode 3 is 100mm 2 .
[0052] There are 4 vent holes on the electrode surface of the first electrode 1, and the vent holes are quadrilateral, pentagonal or hexagonal; the second electrode 2 has 2 central lead-out holes, and the lead-out holes are quadrilateral, pentagonal or hexagonal ; The number of blind holes in the third electrode 3 is 2, and the blind holes are 3-6 prisms or pyramids.
[0053] The detection method of the present embodiment is basically the same as embodiment 1, the difference is:
[0054] The cathode voltage of the firs...
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