Process and device for treating tail gas during producing trichlorosilane
A trichlorosilane, treatment process technology, applied in chlorine/hydrogen chloride, chlorine/hydrogen chloride purification, steam condensation, etc., can solve environmental pollution and other problems
Inactive Publication Date: 2011-06-22
湖北江盐天祥化工有限公司
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Problems solved by technology
The direct evacuation of this part of the tail gas will pollute the environment, so it is necessary to design a tail gas treatment process and its device
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[0019] The treatment process of the present invention is that after the tail gas of the trichlorosilane synthesis section and the trichlorosilane fractionation section is pressurized and compressed by a diaphragm compressor, the pressure of the diaphragm compressor is 0.5-0.8Mpa. Condensate through the water-cooled condenser after the machine in turn, deep condense in the deep-cooled condenser after the machine, absorb in the circulating absorption tower, and recover chlorosilane. The tail gas absorbed by the circulating absorption tower passes through the two-stage falling film absorption tower to recover the hydrogen chloride in the tail gas to make 30% hydrochloric acid. The tail gas absorbed by the falling film absorption tower is basically hydrogen, with only a small amount of nitrogen, which can be directly vented.
[0020] The condensation temperature of the circulating absorption tower is -25°C, -24°C, -23°C, -21°C or -20°C. Pressure: 0.5 ~ 0.55Mpa.
[0021] The gas ...
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The invention relates to a process and device for treating tail gas during producing trichlorosilane. The process provided by the invention comprises: the tail gas generated from a trichlorosilane synthesizing workshop section and a trichlorosilane fractionating workshop section is compressed by a diaphragm compressor in a pressuring way, then condensed by a rear water condenser, deeply condensed by a rear deep condenser, and finally absorbed by a circulating absorption tower to recover the chlorosilane; and the hydrogen chloride in the tail gas which is absorbed by the circulating absorption tower is absorbed by a secondary falling film absorption tower to be made into 30% hydrochloric acid, and the tail gas which is absorbed by the falling film absorption tower is directly discharged to the air after being checked out. The device provided by the invention consists of the diaphragm compressor, the rear water condenser, the rear deep condenser, the circulating absorption tower and the falling film absorption tower which are connected with the one another in series by pipelines, wherein the diaphragm compressor is provided with a tail gas inlet, and the falling film absorption tower is provided with an outlet and an emptying port. According to the invention, the 99.5% of chlorosilane and hydrogen chloride can be recovered; the great mass of the chlorosilane and hydrogen in the tail gas not only can be recovered, but also can be reused, so that the process and device provided by the invention are favorable for environmental conservation.
Description
technical field [0001] The patent of the present invention relates to a tail gas treatment process and device of a trichlorosilane synthesis section and a trichlorosilane fractionation section. Background technique [0002] The tail gas of the trichlorosilane synthesis section and the trichlorosilane fractionation section contains 5.4% chlorosilane, 30% hydrogen chloride gas, 0.2% nitrogen and 64.2% hydrogen, and other gases account for 0.2%. The direct evacuation of this part of the tail gas will cause pollution to the environment, so it is necessary to design a tail gas treatment process and its device. Contents of the invention [0003] The purpose of the present invention is aimed at above-mentioned present situation, aims to provide a kind of tail gas treatment process and its device in the trichlorosilane production that can recover most of chlorosilanes and hydrogen chloride in the tail gas, carry out reuse. [0004] The realization mode of the object of the presen...
Claims
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Login to View More IPC IPC(8): B01D53/18B01D53/14B01D5/00C01B7/07C01B33/107
Inventor 石明胜闵运豪罗涛杨霖徐智
Owner 湖北江盐天祥化工有限公司