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Groove machining tool for use with a thin-film solar cell

A thin-film solar cell and slot processing technology, applied in the field of slot processing tools, can solve problems such as longer processing time

Active Publication Date: 2011-07-20
MITSUBOSHI DIAMOND IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the processing time becomes longer

Method used

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  • Groove machining tool for use with a thin-film solar cell
  • Groove machining tool for use with a thin-film solar cell
  • Groove machining tool for use with a thin-film solar cell

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach -

[0047] [Overall structure of cutting device]

[0048] This device includes: a table 1 for mounting a solar cell substrate W; a holder assembly 3 provided on a cutting head 2; two cameras 4; and two monitors 5 .

[0049] Bench 1 can be built in the horizontal plane figure 1 to move in the Y direction. In addition, the table 1 can be rotated to any angle within the horizontal plane.

[0050] The cutting head 2 can move in the X and Y directions above the table 1 via the movable support mechanism 6 . Additionally, if figure 1 As shown, the X direction is a direction perpendicular to the Y direction in the horizontal plane. The mobile support mechanism 6 has: a pair of support columns 7a, 7b; a guide rod 8 provided across between the pair of support columns 7a, 7b; Guide part 9. The cutting head 2 is movable in the X direction along the guide 9 as described above. Furthermore, an air cylinder (not shown) is provided on the cutting head 2, and the holder assembly 3 can move...

experiment example

[0079] Figure 5 (a) to (c) show monitor images when a thin film is removed using the grooving tool of this embodiment. Figure 5 (a) is a monitor image in the case of using a tool with an inclination angle α=0° of the blade 25 and processing at a moving speed of 100 mm / sec, 400 mm / sec, or 800 mm / sec. and, Figure 5 (b) is a monitor image when processing is performed at the same moving speed using a tool with an inclination angle α=20° of the blade 25, Figure 5 (c) is a monitor image when processing is performed at the same moving speed using a tool with an inclination angle α=30° of the blade 25 . In addition, in each figure, the part shown in white is the part processed by groove processing, and the part shown in black is the part which left the thin film. Furthermore, in each groove, the upper end portion in the drawing is a portion that contacts the second side surface 24e of the blade portion 24 .

[0080] As can be seen from the respective figures, in the case of α=...

no. 1 approach

[0084] [Features of the first embodiment]

[0085] (1) The blade 25 of the blade portion 24 is inclined with respect to the tool moving direction when viewed from the bottom surface. Therefore, when a groove is formed using this groove machining tool, the shearing effect of the end portion in the width direction of the groove is enhanced due to the presence of the knife edge. Therefore, it is possible to suppress film peeling at the groove end portion other than the groove.

[0086] (2) The film removed during grooving is smoothly discharged from one end of the groove toward the center of the groove along the front surface 24 b formed above the blade 25 . Therefore, it is possible to prevent the removed film from deteriorating the cutting performance, and to perform stable high-quality grooving.

[0087] (3) The rectangular tool body 22 is inserted into the rectangular groove 21 of the holder 15 to limit the mounting angle of the groove machining tool 16 . Therefore, the gr...

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Abstract

The present invention provides a groove machining tool for use with a thin-film solar cell whereby peeling-off of the film at the edges of a groove when forming the groove is reduced, and whereby grooves can be machined by an easy process and with high quality. There is provided the groove machining tool supported in a holder and caused to move together with the holder in relative fashion along a scheduled scribe line over an integrated thin-film solar cell substrate to form a groove. The groove machining tool includes a tool body supported in the holder, and a blade tip part formed in a distal part of the tool body. The blade tip part includes a blade extending along a direction intersecting a direction of movement of the tool, at a first end along the direction of movement of the tool. The blade is tilted backward from the direction of movement of the tool in relation to a direction orthogonal to the direction of movement of the groove tool, as viewed from a bottom face of the blade tip part.

Description

technical field [0001] The present invention relates to a groove processing tool, and in particular, to a groove processing tool held by a holder and used to relatively move with the holder along a predetermined cutting line on an integrated thin film solar cell substrate to form a groove. Background technique [0002] When manufacturing an integrated thin-film solar cell, the thin film formed on the substrate is cut and removed, thereby forming strip-shaped grooves for insulation. As a tool for forming the groove, a tool as shown in Patent Document 1 is used. The tool disclosed in this Patent Document 1 has a needle-shaped or chisel-shaped blade. Furthermore, strip-shaped grooves are formed by moving the tool in the groove forming direction. [0003] In the tool disclosed in this patent document 1, when the blade edge is rounded due to wear, the warpage near the end portion of the film adjacent to the cut line increases, and the processing quality of the groove deteriorat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18B26D3/06
CPCH01L31/18H01L31/208B28D1/225H01L21/67092H01L27/1423H01L31/188B28D5/00Y02E10/50H01L31/046Y10T83/0304Y02P70/50H01L31/0445H01L21/304
Inventor 赤井敏男冈本庆太郎曾山正信
Owner MITSUBOSHI DIAMOND IND CO LTD