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Ultrasonic vibration auxiliary grinding device for minutely processing surface of micro-structure

An ultrasonic vibration and precision machining technology, applied in the field of ultrasonic vibration-assisted grinding devices, can solve the problems of destroying the surface shape accuracy of the microstructure and the inability to adjust the vibration direction, so as to reduce the crushing phenomenon, expand the plastic processing domain, and improve the normal direction. The effect of grinding stiffness

Inactive Publication Date: 2012-08-08
HARBIN INST OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The present invention solves the problem that the existing ultrasonic vibration-assisted grinding device cannot adjust the vibration direction, which causes the vibration track to interfere with the surface structure when processing the superhard material microstructure surface, thus destroying the surface shape accuracy of the microstructure surface. Provided is an ultrasonic vibration-assisted grinding device for precision machining of microstructured surfaces

Method used

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  • Ultrasonic vibration auxiliary grinding device for minutely processing surface of micro-structure
  • Ultrasonic vibration auxiliary grinding device for minutely processing surface of micro-structure
  • Ultrasonic vibration auxiliary grinding device for minutely processing surface of micro-structure

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specific Embodiment approach 1

[0010] Specific implementation mode one: combine Figure 1~2 Explain that the ultrasonic vibration-assisted grinding device for microstructure surface precision machining in this embodiment includes a support base plate 3, a vibration table 4, four supports 5, a horn 6, a transducer 7 and an ultrasonic generator 8 , the ultrasonic vibration assisted grinding device also includes a tilting table 1 and a rotary table 2, the lower end surface of the rotary table 2 is fixed on the upper end surface of the tilting table 1, and the support base plate 3 is fixed on the top surface of the rotary table 2 On the upper end face, the vibrating table 4 is fixed above the support base plate 3 through four supports 5, one end of the horn 6 has a small area, and the other end has a large area, and the small area end of the horn 6 is connected to the The side wall of the vibration table 4 is fixedly connected, and the large-area end of the horn 6 is fixedly connected to the transducer 7, and t...

specific Embodiment approach 2

[0012] Specific implementation mode two: combination figure 2 To illustrate, the outline of the vibration table 4 in this embodiment is in the shape of a dumbbell. With such a design, the vibration table 4 can amplify the amplitude of high-frequency mechanical oscillation through its dumbbell-shaped structure. Other compositions and connections are the same as those in Embodiment 1.

specific Embodiment approach 3

[0013] Specific implementation mode three: combination figure 2 Note that there are two vibrating nodal surfaces 4-1 with zero amplitude in the longitudinal direction of the vibrating table 4 in this embodiment, and each vibrating nodal surface 4-1 of the vibrating table 4 is provided with two fixed support plates 4-2, and the four fixed support plates 4-2 on the two vibration joint surfaces 4-1 of the vibration table 4 are arranged in one-to-one correspondence, and the four fixed support plates 4-2 on the vibration work table 4 are respectively It is fixedly connected with the corresponding supporting member 5. This design improves the normal machining stiffness during the grinding process and further ensures the surface shape accuracy of the microstructure surface after grinding. Other compositions and connections are the same as those in Embodiment 2.

[0014] working principle:

[0015] Fix the workpiece to be ground at the center of the upper end surface of the vibrat...

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Abstract

The invention relates to an ultrasonic vibration auxiliary grinding device for minutely processing the surface of a micro-structure. By the ultrasonic vibration auxiliary grinding device, the problem that a vibration trace interferes with a surface structure during processing of the surface of an ultrahard material micro-structure because the conventional ultrasonic vibration auxiliary grinding device cannot adjust a vibration direction and then the surface flatness of the surface of the micro-structure is broken can be solved. The lower end face of a rotary table is fixed on the upper end face of an inclined table; a supporting base plate is fixed on the upper end face of the rotary table; a vibration working table is fixed above the supporting base plate through four supporting pieces; the area of one end face of an amplitude-variable rod is small, and the area of the other end face of the amplitude-variable rod is large; the small-area end of the amplitude-variable rod is fixedly connected with the side wall of the vibration working table, and the large-area end of the amplitude-variable rod is fixedly connected with an energy transducer; and the energy transducer is connected with an ultrasonic generator through a lead wire. In the invention, the ultrasonic vibration direction can be adjusted randomly by adjusting the rotary table and the inclined table, so the normal grinding rigidity is improved; and the ultrasonic vibration auxiliary grinding device is used for minutely processing the surfaces of ceramic ultrahard micro-structures.

Description

technical field [0001] The invention relates to an ultrasonic vibration-assisted grinding device, in particular to an ultrasonic-vibration-assisted grinding device for precision machining of ceramic superhard microstructure surfaces. Background technique [0002] Optical functional components on the microstructure surface of superhard materials are the key components for manufacturing micro-optoelectronic systems. Features. [0003] Superhard material microstructure surface optical functional components are usually manufactured by composite processing technology, in which the precision machining quality of superhard material mold with microstructure surface plays a decisive role in the final product performance and cost control, however, due to the inherent characteristics of these materials The extremely difficult machining and the complex microstructural features of the mold surface make it difficult to achieve ideal results when traditionally processing the microstructur...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/04
Inventor 赵清亮吴晓健郭兵赵玲玲任仲平王义龙孙国燕穆希鹏
Owner HARBIN INST OF TECH
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