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Compound sensor for measuring appearance of nanometer by using holographic laser

A technology for measuring sensors and holographic lasers, which is applied to measuring devices, instruments, and optical devices, etc., can solve the problems of being unable to meet the needs of fast and accurate measurement of nanometer appearance, and the measurement range is small, and achieve the effect of simple structure and low price.

Active Publication Date: 2012-06-27
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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AI Technical Summary

Problems solved by technology

However, due to its small measurement range, usually only a few microns, it cannot meet the needs of rapid and accurate measurement of nanometer appearance.

Method used

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  • Compound sensor for measuring appearance of nanometer by using holographic laser
  • Compound sensor for measuring appearance of nanometer by using holographic laser
  • Compound sensor for measuring appearance of nanometer by using holographic laser

Examples

Experimental program
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Effect test

Embodiment

[0028] A composite holographic laser nanometer shape measurement sensor, such as figure 1 As shown, it consists of holographic laser reading head 1, holographic laser reading head 2, optical components, micro-optical objective lens, measurement template, electrical measurement system, CCD camera and monitoring system; the optical components include optical lens group 1, optical lens Group 2, adjusting lens 1, adjusting lens 2, adjusting lens 3, beam splitter 1 and beam splitter 2;

[0029] The light emitted by the holographic laser reading head 1 becomes parallel light after passing through the optical lens group 1 and the adjusting lens 1, and then focuses on the measurement sample after passing through the beam splitter 1, the beam splitter 2 and the micro-optical objective lens; the holographic laser reading head 2 emits The light becomes parallel light after passing through the optical lens group 2 and the adjusting lens 2, and then focuses to the measurement sample plate ...

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Abstract

The invention discloses a compound sensor for measuring appearance of nanometer by using holographic laser, and belongs to the technical field of nanometer appearance measurement. The compound sensor comprises a holographic laser reading head 1, a holographic laser reading head 2, an optical module, a microscopy optical lens, a measurement sample, an electric measurement system, a camcorder (CCD)and a monitoring system, wherein the optical module used for filtering, aligning and splitting lights comprises an optical lens set 1, an optical lens set 2, an adjusting lens 1, an adjusting lens 2,an adjusting lens 3, a splitting lens 1 and a splitting lens 2. The compound sensor has a simple structure and key parts are low in cost. A holographic laser element is taken as the core, and the design structure for the sensor is proposed; by combining improvement on measurement range and maintenance of measurement precision, the sensor can be effectively matched with the measurement system to improve automatic control level for measurement of the system. Moreover, the sensor with video monitoring function can meet the requirements of several fields.

Description

technical field [0001] The invention relates to a composite holographic laser nanometer shape measurement sensor, which belongs to the technical field of nanometer shape measurement. Background technique [0002] Parts with complex structures at the nanometer scale exhibit special shapes due to their various shapes, volumes, materials, and characteristics, and require relatively high measurement accuracy, making it very difficult to measure them accurately. Nano-morphological features are key parameters that need to be measured in the field of nanotechnology applications. Accurate measurement results are helpful for analyzing the essential characteristics of products, quality control, and process adjustment, thereby speeding up the process of production technology development. [0003] In nano-topography measurement, the measurement accuracy and measurement range of the sensor are usually contradictory, and the selection of high-precision measurement sensors often seriously ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
Inventor 朱振宇王霁任冬梅李华丰焦小康张文军
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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