The invention discloses a compound sensor for measuring appearance of nanometer by using holographic laser, and belongs to the technical field of nanometer appearance measurement. The compound sensor comprises a holographic laser reading head 1, a holographic laser reading head 2, an optical module, a microscopy optical lens, a measurement sample, an electric measurement system, a camcorder (CCD) and a monitoring system, wherein the optical module used for filtering, aligning and splitting lights comprises an optical lens set 1, an optical lens set 2, an adjusting lens 1, an adjusting lens 2, an adjusting lens 3, a splitting lens 1 and a splitting lens 2. The compound sensor has a simple structure and key parts are low in cost. A holographic laser element is taken as the core, and the design structure for the sensor is proposed; by combining improvement on measurement range and maintenance of measurement precision, the sensor can be effectively matched with the measurement system to improve automatic control level for measurement of the system. Moreover, the sensor with video monitoring function can meet the requirements of several fields.