Silica-based unequal-width microchannel flat heat pipe and manufacture method thereof

Abstract

The invention discloses a silica-based unequal-width microchannel flat heat pipe and a manufacture method thereof. By using a principle that liquid flows in a microchannel without a mechanical force under the action of surface tension and an MEMS (Micro Electro Mechanical System) technology, unequal-width rectangular or V-shaped microchannels with same cluster structures and continuously-changing widths are respectively etched on two rectangular silicon chips, rectangular glass sheets completely same with the silicon chips in sizes are etched to form hollow glass rings as steam cavities of flat heat pipes, and the glass rings and the upper and the lower silicon chips are packaged together to form the silica-based unequal-width microchannel flat heat pipe by adopting a static packaging method. Under the condition of smaller liquid filling rate, working liquid is accelerated to flow from a wide end to a narrow end through capillary pressure difference generated by liquid surface tension at two ends of an unequal-width microchannel, thus heat transfer efficiency is improved, capillary limit of the heat pipe is greatly improved, and heat transfer capacity of the heat pipe is increased; and the silica-based unequal-width microchannel flat heat pipe can be used in a heat-radiating system of a high heat-flow density chip for solving the heat radiation problem of a high-performance chip.

Description

technical field [0001] The invention belongs to the research field of micro-groove flat heat pipes, and in particular relates to a silicon-based unequal-width micro-groove which can replace equal-width micro-grooves by using unequal-width micro-grooves to improve capillary limit and heat transfer capacity of flat heat pipes A flat plate heat pipe and a preparation method thereof. Background technique [0002] The micro-channel flat plate heat pipe is the result of the continuous miniaturization of traditional heat pipes. It is used to solve the problem of increasing heat flux of electronic chips, and has attracted much attention in the fields of scientific research and application. Micro-channel flat plate heat pipe is a new type of heat transfer element based on capillary phenomenon and phase change principle. Compared with the traditional heat transfer method of heat dissipation system, it has the advantages of small size, stable operation, high efficiency, and no mechanic...

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Problems solved by technology

[0007] In 1999, R. Hopkins et al. conducted theoretical and experimental studies on the heat transfer, axial temperature distribution and thermal resistance of copper-horizontal plate heat pipes with three axial channels at different operating temperatures, and found that the capillary limit is in general Lower limit on the heat transfer performance of micro-flat heat pipes

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