Micro gyroscope capable of regulating and reducing quadrature errors

Abstract

The invention discloses a micro gyroscope capable of regulating and reducing quadrature errors, relating to a gyroscope. The micro gyroscope is provided with a lower layer as a substrate, the surface of the substrate is provided with a deep groove prepared for a suspending structural layer, the micro gyroscope is provided with an upper layer integrally made of monocrystalline silicon, the upper layer forms a gyroscope mechanical structure through local etching and comprises a drive frame body, a detection mass block, a suspension detection electrode mass block, an electric insulation beam, a drive support beam, a detection support beam, a detection electrode support beam, a detection electrode and a drive electrode, wherein the detection mass block is connected with the peripheral drive frame, the left side and the right side of the drive frame are symmetrically provided with comb teeth, the comb teeth are staggered with comb teeth of the external drive electrode, and the peripheral drive frame is connected with the silicon substrate through the drive support beam; and one side of the detection electrode mass block is connected with the drive frame through the electric insulation beam and the detection electrode mass block and the drive frame are distributed on four corners at the inner side of the detection mass block, and the other side of the detection electrode mass block is connected with the detection electrode. The invention can realize drive mode and detection mode decoupling and adjustable relative angle between the drive frame vibration direction and the detection mass block vibration direction.

Description

technical field [0001] The invention relates to a gyroscope, in particular to a micro gyroscope which can be adjusted to reduce the quadrature error. Background technique [0002] A gyroscope is a measuring device that detects angular velocity or angle. The micro-mechanical gyroscope can make the gyroscope have the advantages of small size, light weight, low power consumption, strong anti-overload ability, and can be applied to relatively harsh environmental conditions through the processing technology of the micro-electromechanical system. In recent years, the market demand for micro-mechanical gyroscopes has been increasing, such as in the automotive industry, mobile communication terminals, civil inertial navigation systems, consumer electronics products, etc. The actual application products include anti-roll rate sensors, air attitude maintenance systems, autonomous Navigation systems, mobile terminals, 3D mice, game controllers, game consoles, image stabilization for d...

AI Technical Summary

Problems solved by technology

Although this design reduces the stiffness coupling between modes, it cannot overcome the orthogonality error caused by the deviation of the direction of motion between the driving mass and the detection mass from the original design direction.

In 1998, William A. Clark of the University of California, Berkeley (William A. Clark et al., Surface micromachined Z-axis vibratory rate gyroscope, Technical Digest. Solid-State Sensor and Actuator Workshop, 1996, 283-287) proposed to use external The circuit applies electrostatic force to generate torque to correct the resonance direction of the mass block that deviates from the design direction, but in this design, the driving mode elastic support beam is shared with the detection mode elastic support beam, and the stiffness coupling is large, so the performance of the gyroscope is affected. restrict

[0005] Chinese patent 200310101017.8 discloses a micro gyroscope that can be adjusted to overcome external translational acceleration, and the detection electrode is designed as a suspension detection, but this design cannot overcome the influence of orthogonal error

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