Non-contact type active damping device

Abstract

The invention discloses a non-contact type active damping device. The device comprises a damper and a driver, wherein the damper is electrically connected with the driver and comprises a stationary stator and a damping generator which is separated from the stator; and the damping generator can move in one direction relative to the stator. The damping device consists of a rotor and a stator which are separated, and the driving current of a driving circuit is adjusted in an active control mode, so that active control over damping force can be realized. Adaptive variable damping control can be provided for an ultra-precise vibration absorber by the damping device, so that the high frequency vibration of a vibration absorbing table can be effectively weakened. An ultra-quiet environment can be provided for a photoetching machine and other precise equipment by the non-contact type active damping device. The non-contact type active damping device can be used as the basic support of miniature ultra-precise equipment and precise instruments. By serially connecting the damping device with passive damping devices such as air springs, hydraulic vibration isolators and the like, precise vibration absorption also can be performed on large-size equipment and large-size instruments.

Description

technical field [0001] The invention belongs to the field of mechanical dynamics, and in particular relates to a non-contact active damping device, which includes a damper and a drive circuit. The damper and its drive circuit are suitable for occasions where there is no mechanical contact and the damping force is actively controlled. Background technique [0002] The damping device is a device that provides movement resistance and consumes movement energy. The technology of using damping to absorb energy and reduce vibration is very common in the machinery industry. It has expanded from the early aerospace, aviation, military, automobile and other fields to the current engineering structures such as machine tools, instruments, buildings, bridges, and railways. Swift. [0003] Traditional damping devices such as spring damping devices, friction damping devices, hydraulic damping devices, viscous damping devices, etc. are mostly passive damping devices, which can only isolat...

AI Technical Summary

Problems solved by technology

[0003] Traditional damping devices such as spring damping devices, friction damping devices, hydraulic damping devices, viscous damping devices, etc. are mostly passive damping devices, which can only isolate the high-frequency vibration transmitted from the vibration source to the isolated object, although the damping force of some damping devices Adjustable, but this adjustment is not controllable in real time

Secondly, the traditional damping device has mechanical contact or liquid (gas) as the force transmission medium in the working process, and the vibration isolation effect is difficult to meet the requirements of high-precision equipment and precision instruments.

In addition, although the traditional damping device has a large damping force and a strong bearing capacity, it has a slow response speed and poor instantaneous stability.

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