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Single focal plane high-precision testing method for optical wavefront of optical imaging system

The technology of an optical imaging system and testing method, which is applied in the field of optical testing, can solve problems such as uneven distribution of exit pupil amplitude and calculation errors, and achieve the effects of avoiding the introduction of vibration errors, simple testing equipment, and low environmental requirements

Inactive Publication Date: 2012-09-19
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The present invention solves the problem of uneven distribution of exit pupil amplitude and calculation error introduced by fast Fourier transform in the existing phase recovery algorithm, and provides a solution for eliminating the impact of vibration on detection accuracy in the process of multi-focal plane image acquisition, and provides A single focal plane high-precision testing method for the optical wavefront of an optical imaging system

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  • Single focal plane high-precision testing method for optical wavefront of optical imaging system
  • Single focal plane high-precision testing method for optical wavefront of optical imaging system
  • Single focal plane high-precision testing method for optical wavefront of optical imaging system

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specific Embodiment approach 1

[0013] Specific implementation mode 1. Combination figure 1 with figure 2 Describe this embodiment, the single focal plane high-precision test method of the optical wavefront of the optical imaging system, this method is realized by the following steps:

[0014] Step 1. Build a detection platform for the optical imaging system;

[0015] Step 2, using the detection device in the detection platform described in step 1 to detect the focal plane position of the lens to be tested 4, and the detection device to obtain the out-of-focus star point image of the lens to be tested 4;

[0016] Step 3, select effective data according to the out-of-focus star image obtained in step 2, and calculate the pupil function of the optical system; the pupil function of the calculation optical system adopts Zernike polynomials, extended Naipol Zernike polynomials and generalized inverse matrix Calculation; specifically: the Zernike polynomial multiplied by the Zernike coefficient, the point sprea...

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Abstract

The invention discloses a single focal plane high-precision testing method for optical wavefront of an optical imaging system, relates to the technical field of optical testing, solves the problems that exit pupil amplitudes are not distributed uniformly and calculation errors are introduced by fast Fourier transform in the conventional phase retrieval algorithm, and provides the scheme for eliminating the influence of vibration in the process of image acquisition on detection accuracy. The method comprises the following steps of: establishing a detection platform of the optical imaging system; detecting the position of the focal plane of a lens to be detected by using a detection device in the detection platform and acquiring an out-of-focus stellar image of the lens to be detected by the detection device; selecting effective data according to the acquired out-of-focus stellar image and calculating a pupil function of an optical system; and extracting the phase of the acquired pupil function to obtain the optical wavefront of the optical imaging system. The pupil function of the optical system is calculated by a Zernike multinomial, an extended Nijboer-Zernike multinomial, and a generalized inverse matrix. The single focal plane high-precision testing method is low in cost, and high in accuracy and is suitable for manufacturing enterprises, scientific research and detection units of the optical imaging system.

Description

technical field [0001] The invention relates to the technical field of optical testing, in particular to a method for high-precision testing of the optical wavefront of an optical imaging system by collecting star point images on a single focal plane. Background technique [0002] As early as the last century, foreign developed countries have started the research on phase restoration technology, and the method of obtaining wave aberration of optical system through phase restoration technology has been applied in the on-orbit debugging of large space telescopes. At present, domestic researches are also actively carried out on wavefront detection using the method of phase restoration. In this method, the exit pupil wavefront of the system is obtained by collecting and analyzing the star point image at the focal plane and using the phase restoration algorithm. In these algorithms, the point spread function (PSF) is calculated by fast Fourier transform by estimating the exit pu...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J9/00
Inventor 邵晶马冬梅聂真威刘金国郭永飞
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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