Single focal plane high-precision testing method for optical wavefront of optical imaging system
The technology of an optical imaging system and testing method, which is applied in the field of optical testing, can solve problems such as uneven distribution of exit pupil amplitude and calculation errors, and achieve the effects of avoiding the introduction of vibration errors, simple testing equipment, and low environmental requirements
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[0013] Specific implementation mode 1. Combination figure 1 with figure 2 Describe this embodiment, the single focal plane high-precision test method of the optical wavefront of the optical imaging system, this method is realized by the following steps:
[0014] Step 1. Build a detection platform for the optical imaging system;
[0015] Step 2, using the detection device in the detection platform described in step 1 to detect the focal plane position of the lens to be tested 4, and the detection device to obtain the out-of-focus star point image of the lens to be tested 4;
[0016] Step 3, select effective data according to the out-of-focus star image obtained in step 2, and calculate the pupil function of the optical system; the pupil function of the calculation optical system adopts Zernike polynomials, extended Naipol Zernike polynomials and generalized inverse matrix Calculation; specifically: the Zernike polynomial multiplied by the Zernike coefficient, the point sprea...
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