Copper-Containing Fixed Abrasive Abrasive Polishing Pads
A technology for consolidating abrasives and polishing pads, applied in abrasives, metal processing equipment, manufacturing tools, etc., can solve the problems of affecting the precision of the processed surface, insufficient rigidity of the grinding and polishing pads, reducing the processing efficiency, etc. The effect of improving self-dressing ability and improving processing efficiency
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment 1
[0018] Example 1: A kind of copper-containing fixed abrasive abrasive polishing pad, it is by 350g grain size be the diamond abrasive of 40 microns, 150g grain size is the atomized pure copper powder of 20 microns and 500g resin (can adopt exactly the same as used in the existing polishing pad Resins, such as hydrophilic resins, can also be realized by using the resin formulations used in the applicant's previous application numbers of 2007100248219, 2008102440960, 2008100227414, 2009102135958, 201010145260X, the same below) to form after uniform mixing and curing. Existing polishing pads are the same. The key point of the present invention is that copper powder is added to the polishing pad, and the remaining components are basically the same as the prior art except for the proportioning relationship. The surface shape of K9 glass processed by the abrasive polishing pad is increased by 100%, the material removal rate is increased by 300%, and the self-repairing ability is in...
Embodiment 2
[0019] Example 2: The invention discloses a copper-containing consolidated abrasive grinding and polishing pad, which is formed by uniformly mixing abrasive, copper powder and resin and curing, and its preparation method is the same as that of the existing polishing pad. The abrasive is 200g of cerium oxide, the copper powder is 250g of pure copper powder, and the resin is 550g. The key point of the present invention is that copper powder is added to the polishing pad, and the remaining components are basically the same as the prior art except for the proportioning relationship. The particle size of cerium oxide is 10 microns, and the particle size of pure copper powder is 10 microns. The surface shape of K9 glass made of grinding and polishing pad is increased by 150%, the material removal rate is increased by 200%, and the self-repairing ability is increased by 60 times. Grinding and polishing monocrystalline silicon wafers, the surface shape is improved by 50%, the mater...
Embodiment 3
[0020] Example 3: A copper-containing fixed abrasive grinding and polishing pad, which is formed by uniformly mixing abrasives, copper powder and resin, and curing, and its preparation method is the same as the existing polishing pad, wherein the abrasive is 400g of silicon carbide, and the copper powder is brass powder 150g: 450g of resin. The key point of the present invention is that copper powder is added to the polishing pad, and the remaining components are basically the same as the prior art except for the proportioning relationship. The particle size of the silicon carbide is 50-60 microns, and the particle size of the brass powder is 20 microns. Made into grinding and polishing pads, the surface shape of K9 glass is improved by 50%, the material removal rate is increased by 300%, and the self-repairing ability is increased by 40 times. Grinding and polishing monocrystalline silicon wafers, the surface shape is improved by 40%, the material removal rate is increased...
PUM
Property | Measurement | Unit |
---|---|---|
Granularity | aaaaa | aaaaa |
Granularity | aaaaa | aaaaa |
Granularity | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com