Heat exchange platform with improved structure for polysilicon ingot furnace
A technology of polysilicon ingot furnace and heat exchange table, which is applied in the directions of polycrystalline material growth, crystal growth, single crystal growth, etc., can solve the problems of failure to achieve breakthroughs in technological improvement, and achieve stability, good heat exchange effect and The effect of controllability and precise temperature control
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[0062] The present invention will be further described below in conjunction with accompanying drawing.
[0063] The improved structure heat exchange table for polysilicon ingot furnace is used to place the crucible of polysilicon ingot furnace and realize heat exchange, usually made of graphite. The heat exchange platform is provided with a gas inlet and a gas outlet, and a cooling air channel is arranged inside the heat exchange platform, and is connected with the aforementioned gas inlet and gas outlet.
[0064] Usually, based on the processing method, graphite material cannot be processed into internal channels with changing shapes without cutting. Therefore, the commonly used method is to divide it into a layered structure, slot the two layers according to the designed channel shape, and then put the two layered structures together to obtain heat exchange table products with various shapes and structures.
[0065] As a special case, the heat exchange platform does not rea...
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