Manufacturing method of photoelectric conversion device, photoelectric conversion device, manufacturing system of photoelectric conversion device, and method of use of photoelectric conversion device manufacturing system

Abstract

A photoelectric conversion device manufacturing method manufactures a photoelectric conversion device (10) in which a first photoelectric conversion unit (3) and a second photoelectric conversion unit (4) are sequentially stacked on a transparent-electroconductive film (2) formed on a substrate (1). The method includes: forming each of a first p-type semiconductor layer (31), a first i-type semiconductor layer (32), a first n-type semiconductor layer (33), and a second p-type semiconductor layer (41) in a plurality of first plasma CVD reaction chambers (62, 63, 64, 65); exposing the second p-type semiconductor layer (41) to an air atmosphere; supplying a gas including p-type impurities to inside a second plasma CVD reaction chamber (72) before forming of the second i-type semiconductor layer (42); forming the second i-type semiconductor layer (42) on the second p-type semiconductor layer (41) that was exposed to an air atmosphere, in the second plasma CVD reaction chamber (72); and forming the second n-type semiconductor layer (43) on the second i-type semiconductor layer (42).

Description

technical field [0001] The present invention relates to a method for manufacturing a photoelectric conversion device, a photoelectric conversion device, a manufacturing system for a photoelectric conversion device, and a method for using a photoelectric conversion device manufacturing system. In particular, the present invention relates to a technique for stably manufacturing a photoelectric conversion device with good performance without degrading characteristics even when the number of substrates to be processed is increased, and improving production cost and efficiency. [0002] This application claims priority based on Japanese Patent Application No. 2009-020859 filed on January 30, 2009, the contents of which are incorporated herein by reference. Background technique [0003] In recent years, photoelectric conversion devices are generally used in solar cells, photosensors, and the like, and in solar cells in particular, they have begun to spread widely from the viewpoin...

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Problems solved by technology

[0036] In order to solve the problem that the characteristics of the photoelectric conversion device decrease as the number of processed substrates increases due to the influence of n-type impurities accumulated inside one reaction chamber, the present inventors conducted careful studies.

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