Isolation structure of high voltage driver circuit
一种高压驱动电路、隔离结构的技术,应用在电路、电气元件、半导体器件等方向,能够解决P型结隔离区不能完全耗尽、击穿等问题,达到灵活性大、制备简单的效果
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Embodiment 1
[0024] An isolation structure for a high-voltage driving circuit, comprising: a P-type substrate 1, a P-type epitaxial layer 2 is arranged on the P-type substrate 1, a low-voltage region 130 and a high-voltage region 110 are arranged on the P-type epitaxial layer 2, and the Between the low-voltage region 130 and the high-voltage region 110, there is a high-low voltage junction termination region 120, and between the high-voltage and low-voltage junction termination region 120 and the low-voltage region 130 is a first P-type junction isolation region 140a. The first P-type junction isolation The region 140a is composed of the P-type buried layer 4 and the first P-type well region 71, and a second P-type junction isolation region 140b is provided in the inner region of the first P-type junction isolation region 140a, and the second P-type junction isolation region 140b is connected to the first P-type junction isolation region 140a. The first P-type junction isolation region 140a...
Embodiment 2
[0026] An isolation structure for a high-voltage driving circuit, comprising: a P-type substrate 1, a P-type epitaxial layer 2 is arranged on the P-type substrate 1, a low-voltage region 130 and a high-voltage region 110 are arranged on the P-type epitaxial layer 2, and the Between the low-voltage region 130 and the high-voltage region 110, there is a high-low voltage junction termination region 120, and between the high-voltage and low-voltage junction termination region 120 and the low-voltage region 130 is a first P-type junction isolation region 140a. The first P-type junction isolation The region 140a is composed of the P-type buried layer 4 and the first P-type well region 71, and a second P-type junction isolation region 140b is provided in the inner region of the first P-type junction isolation region 140a, and the second P-type junction isolation region 140b is connected to the first P-type junction isolation region 140a. The first P-type junction isolation region 140a...
Embodiment 3
[0028] An isolation structure for a high-voltage driving circuit, comprising: a P-type substrate 1, a P-type epitaxial layer 2 is arranged on the P-type substrate 1, a low-voltage region 130 and a high-voltage region 110 are arranged on the P-type epitaxial layer 2, and the Between the low-voltage region 130 and the high-voltage region 110, there is a high-low voltage junction termination region 120, and between the high-voltage and low-voltage junction termination region 120 and the low-voltage region 130 is a first P-type junction isolation region 140a. The first P-type junction isolation The region 140a is composed of the P-type buried layer 4 and the first P-type well region 71, and a second P-type junction isolation region 140b is provided in the inner region of the first P-type junction isolation region 140a, and the second P-type junction isolation region 140b is connected to the first P-type junction isolation region 140a. The first P-type junction isolation region 140a...
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