Method for separating carbon nanotubes with different conductive performances

Abstract

The invention belongs to the technical field of integrated-circuit manufacture, in particular to a method for separating carbon nanotubes with different conductive performances. The method disclosed by the invention comprises the following steps of: soaking an integrated-circuit material containing metallic carbon nanotubes and semiconducting carbon nanotubes into liquid, then enabling the liquid to enter the same container from the same inlet, and arranging an electric field and a pair of magnetic poles with formed magnetic-force lines vertical to the electric field around the container; and converting the directions and the sizes of power lines of the electric field and the directions and the sizes of the magnetic-force lines to separate the metallic carbon nanotubes from the semiconducting carbon nanotubes. The metallic carbon nanotubes and the semiconducting carbon nanotubes obtained by using the method disclosed by the invention have high purity, and the yield product of an integrated circuit using the semiconducting carbon nanotubes can be greatly improved. The method disclosed by the invention is simple and easy to operate, the cost is low, and the manufacturing cost of the high-purity carbon nanotubes can be greatly lowered.

Description

technical field [0001] The invention belongs to the technical field of integrated circuit manufacturing, and in particular relates to a method for separating carbon nanotube materials with different electrical conductivity. Background technique [0002] With the development of integrated circuits, the continued scaling of silicon-based transistors has become increasingly difficult. Semiconducting carbon nanotubes have high application value in integrated circuit manufacturing due to their small volume and high conductivity, and field effect tubes composed of semiconducting carbon nanotubes can realize metal-oxide-silicon ( metal-oxide-silicon, MOS) FET function. figure 1 It is a carbon nanotube field effect tube. There is an insulator between the gate 101 and the semiconducting carbon nanotube 104 for insulation. By applying a voltage to the gate 101, the magnitude of the current between the source 102 and the drain 103 can be controlled . In addition, metallic carbon nan...

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Problems solved by technology

This method requires the use of special surfactants and long-term centrifugal purification process, which is expensive and not easy to produce on a large scale.

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