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Air spring vibration isolator based on gas-solid damping and coupling action adjusted by air cylinder

A technology of air springs and vibration isolators, which is applied in the direction of gas shock absorbers, springs/shock absorbers, springs, etc., to achieve the effect of improving vibration isolation performance

Active Publication Date: 2012-01-25
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Considering that the vibration isolator has strong vibration, micro vibration and impact load in the vertical direction, the damping link of the air spring vibration isolator described in the above invention has obvious shortcomings

Method used

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  • Air spring vibration isolator based on gas-solid damping and coupling action adjusted by air cylinder
  • Air spring vibration isolator based on gas-solid damping and coupling action adjusted by air cylinder
  • Air spring vibration isolator based on gas-solid damping and coupling action adjusted by air cylinder

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Embodiment Construction

[0027] Specific embodiments of the present invention are described in detail below in conjunction with accompanying drawings, as image 3 , Figure 4 , Figure 5 and Figure 6 As shown, an embodiment of the air spring isolator of the present invention is shown.

[0028]The air spring vibration isolator is equipped with an inner cylinder 6 inside the outer cylinder 7, and the air spring airbag 5 is set outside the upper end of the inner cylinder 6. The outer cylinder 7 is sealed and connected with the lower end of the air spring airbag 5 through its upper end boss, and the inner cylinder 6 The annular cover plate 2 affixed to its upper end is sealed and connected with the upper end of the air spring airbag 5 , the air inlet 13 is arranged on the outer wall of the outer cylinder 7 , and a group of throttle holes 10 arranged in a circle are arranged on the inner wall of the outer cylinder 7 . The lower end is sealed and equipped with a circular bottom plate 14, and the support...

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Abstract

The invention discloses an air spring vibration isolator based on a gas-solid damping and coupling action adjusted by an air cylinder, belonging to the fields of ultra precise measurement and processing. An air cylinder unit which is radially distributed on the vibration isolator is assembled at the bottom of an inner cylinder; a curved damping sheet is fixedly arranged at the outer side part of the air cylinder unit and is in contacted fit with the inner wall of an outer cylinder; and an inclined plane-driving throttling hole area adjusting device is assembled below a throttling hole on the inner wall of the outer cylinder. The total area of the throttling hole is reasonably adjusted by using air throttling damping and the throttling hole area adjusting device; damping with optimal magnitude can be provided when strong vibration and impact load exist in the vertical direction; the reciprocating motion of Coulomb damping and the curved damping sheet relative to the outer cylinder provides damping for the vibration isolator; the real-time adjustment of the Coulomb damping can be realized by adjusting the work pressure of an air cylinder; and the damping with optimal magnitude can be provided when strong vibration, microvibration and impact load exist in the vertical direction.

Description

technical field [0001] The invention belongs to the field of ultra-precision measurement and processing, and in particular relates to an air spring vibration isolator based on gas-solid damping coupling effect adjusted by a cylinder. Background technique [0002] A vibration isolation device with excellent performance is one of the key technologies for ultra-precision measurement and processing. The air spring vibration isolator has the advantages of good ultra-low frequency vibration isolation performance, high bearing capacity, low equivalent stiffness, natural frequency insensitivity to load changes, easy system implementation, and low energy consumption. With the development of ultra-precision measurement and processing technology With the development of , nanotechnology and VLSI manufacturing technology, air spring isolators have been more and more widely used. Vibration isolation of a measurement frame such as a photolithography machine that carries all exposure eleme...

Claims

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Application Information

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IPC IPC(8): F16F9/04F16F9/32
Inventor 谭久彬夏超王雷闻荣伟杨文国
Owner HARBIN INST OF TECH
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