Sodium sputtering doping method for large scale cigs based thin film photovoltaic material
A thin-film photovoltaic and sodium-doped technology, which is applied in sputtering coating, metal material coating process, vacuum evaporation coating, etc., can solve the problems that cannot be applied in a wide range of time, difficult to integrate thin films, and poor reliability.
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[0014] figure 1 is a flowchart illustrating a method of fabricating a thin film photovoltaic material according to an embodiment of the present invention. The method 1000 includes the following processes:
[0015] 1. Process 1010 for providing a transparent substrate having a surface;
[0016] 2. Process 1020 for forming a barrier material on the surface;
[0017] 3. Process 1030 for forming electrodes;
[0018] 4. Process 1040 for forming a first precursor material overlying the electrode using a sodium-containing target device, wherein the sodium-containing target device comprises >90% copper-gallium species;
[0019] 5. Process 1050 for forming a second precursor material overlying the first precursor material using a copper-gallium target device;
[0020] 6. Process 1060 for forming a third precursor material overlying the second precursor material using an indium target device;
[0021] 7. Process 1070 for subjecting at least a first precursor material, a second prec...
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